ACTIVELY COOLED VACUUM ISOLATION VALVE
A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.
1 . A cooled isolation valve, comprising:
a valve body;
a stationary element coupled to the valve body and stationary with respect to the valve body;
a movable closure element being movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position, one of the movable closure element and the stationary element comprising a sealing element, in the closed position of the movable closure element, the sealing element providing a seal between the movable closure element and the stationary element; and
a fluid channel formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element.
2 . The cooled isolation valve of claim 1 , further comprising:
a sensor for detecting whether the movable closure element is in the open position or the closed position; and
an actuator for inhibiting flow of the fluid when the sensor detects that the movable closure element is in the closed position.
3 . The cooled isolation valve of claim 1 , further comprising:
a pneumatic actuation device for controlling movement of the movable closure element; and
a bellows for isolating the pneumatic actuation device from an environment within the valve body, the bellows being disposed adjacent to the pneumatic actuation device radially from a longitudinal axis of the valve and at least partially overlapping the pneumatic actuation device along the longitudinal axis.
4 . The cooled isolation valve of claim 1 , wherein the sealing element comprises an O-ring.
5 . The cooled isolation valve of claim 4 , further comprising:
a groove in one of the stationary element and the movable closure element, the O-ring being disposed in the groove, and a surface of the O-ring protruding from the groove; and
a protrusion in a surface of the other of the stationary element and the movable closure element, the protrusion contacting a portion of the protruding surface of the O-ring when the movable closure element is in the closed position, such that the O-ring is free to expand and contract.
6 . The cooled isolation valve of claim 4 , further comprising:
a groove in one of the stationary element and the movable closure element, the O-ring being disposed in the groove, and a surface of the O-ring protruding from the groove; and
a concave feature in a surface of the other of the stationary element and the movable closure element, the concave feature contacting a portion of the protruding surface of the O-ring when the movable closure element is in the closed position, such that the O-ring is free to expand and contract.
7 . The cooled isolation valve of claim 1 , wherein the valve is a poppet valve.
8 . The cooled isolation valve of claim 7 , wherein the movable closure element comprises a nosepiece of the poppet valve.
9 . The cooled isolation valve of claim 8 , wherein the stationary element comprises a valve seat of the poppet valve.
10 . The cooled isolation valve of claim 8 , wherein at least a portion of the cooling channel is formed in the nosepiece.
11 . The cooled isolation valve of claim 8 , wherein the nosepiece is coupled to a movable stem of the cooled isolation valve.
12 . The cooled isolation valve of claim 11 , wherein at least a portion of the cooling channel is formed in the stem.
13 . The cooled isolation valve of claim 7 , wherein the sealing element comprises an O-ring in a groove, the groove being formed in a nosepiece of the poppet valve.
14 . The cooled isolation valve of claim 1 , wherein:
the valve is a gate valve; and
the movable closure element comprises a gate movable between the closed position and the open position and a shaft fixedly attached to the gate, rotation of the shaft causing movement of the gate between the open and closed positions.
15 . The cooled isolation valve of claim 14 , wherein the stationary element comprises a valve seat.
16 . The cooled isolation valve of claim 14 , wherein at least a portion of the cooling channel is formed in the gate.
17 . The cooled isolation valve of claim 14 , wherein at least a portion of the cooling channel is formed in the shaft.
18 . The cooled isolation valve of claim 14 , wherein the sealing element comprises an O-ring in a groove, the groove being formed in the gate.
19 . The cooled isolation valve of claim 1 , wherein:
the valve is a butterfly valve; and
the movable closure element comprises a flapper movable between the closed position and the open position and a shaft fixedly attached to the flapper, rotation of the shaft causing movement of the flapper between the open and closed positions.
20 . The cooled isolation valve of claim 19 , wherein the stationary element comprises walls of an opening through the valve.
21 . The cooled isolation valve of claim 19 , wherein at least a portion of the cooling channel is formed in the flapper.
22 . The cooled isolation valve of claim 19 , wherein at least a portion of the cooling channel is formed in the shaft.
23 . The cooled isolation valve of claim 1 , wherein the fluid comprises a gas.
24 . The cooled isolation valve of claim 1 , wherein the fluid comprises a liquid.
25 . The cooled isolation valve of claim 1 , wherein the fluid comprises air.
26 . The cooled isolation valve of claim 1 , wherein the fluid comprises nitrogen (N 2 ).
27 . The cooled isolation valve of claim 1 , wherein the fluid comprises water.
28 . The cooled isolation valve of claim 1 , wherein the fluid comprises a heat transfer fluid.
29 . A method of forming a bellows for an isolation valve, comprising:
forming a metallic bellows substrate;
configuring the metallic bellows substrate to one of a compressed state and an elongated state;
applying a first layer of a ceramic coating to the metallic bellows substrate while the metallic bellows substrate is maintained in the one of the compressed state and the elongated state;
transitioning the metallic bellows substrate to the other of the compressed state and the elongated state; and
applying a second layer of the ceramic coating while the metallic bellows substrate is maintained in the other of the compressed state and the elongated state.
30 . The method of claim 29 , wherein the metallic bellows substrate is formed of stainless steel.
31 . The method of claim 29 , wherein the ceramic coating comprises aluminum oxide.
32 . The method of claim 29 , wherein a ratio of thickness of the metallic bellows substrate to thickness of the ceramic coating is greater than 100:1.
33 . A bellows for a vacuum isolation valve, comprising:
a metallic substrate; and
a coating of ceramic material formed over the metallic substrate.
34 . The bellows of claim 33 , wherein the metallic bellows substrate is formed of stainless steel.
35 . The bellows of claim 33 , wherein the ceramic coating comprises aluminum oxide.
36 . The bellows of claim 33 , wherein a ratio of thickness of the metallic bellows substrate to thickness of the ceramic coating is greater than 100:1.