Semiconductor crystal substrate, infrared detector, method for producing semiconductor crystal substrate, and method for producing infrared detector
A semiconductor crystal substrate includes a crystal substrate that is formed of a material including one of GaSb and InAs, a first buffer layer that is formed on the crystal substrate and formed of a material including GaSb, and a second buffer layer that is formed on the first buffer layer and formed of a material including GaSb. The first buffer layer has a p-type conductivity, and the second buffer layer has an n-type conductivity.
1. A semiconductor crystal substrate, comprising:
a crystal substrate that is formed of a material including one of GaSb and InAs;
a first buffer layer that is formed on the crystal substrate and formed of a material including GaSb, a composition ratio of Ga in the first buffer layer being greater than a composition ratio of Sb in the first buffer layer, the first buffer layer having a p-type conductivity; and
a second buffer layer that is formed on the first buffer layer and formed of a material including GaSb, a composition ratio of Sb in the second buffer layer being greater than a composition ratio of Ga in the second buffer layer, the second buffer layer having an n-type conductivity, wherein
a concentration of a dopant in the first buffer layer is less than or equal to 1.0×10 17 cm −3 ;
a carrier concentration in the first buffer layer is within a range having a lower value of 1×10 18 cm −3 and an upper value of 1×10 20 cm −3 ;
a concentration of a dopant in the second buffer layer is less than or equal to 1.0×10 17 cm −3 ; and
a carrier concentration in the second buffer layer is within a range having a lower value of 1×10 18 cm −3 and upper value of 1×10 20 cm −3 .
2. The semiconductor crystal substrate as claimed in claim 1 , wherein
the first buffer layer is formed of the material including GaSb and one or both of In and As; and
the second buffer layer is formed of the material including GaSb and one or both of In and As.
3. An infrared detector, comprising:
a crystal substrate that is formed of a material including one of GaSb and InAs;
a first buffer layer that is formed on the crystal substrate and formed of a material including GaSb, the first buffer layer having a p-type conductivity;
a second buffer layer that is formed on the first buffer layer and formed of a material including GaSb, the second buffer layer having an n-type conductivity;
a first contact layer that is formed on the second buffer layer and has a first conductivity type;
an infrared absorption layer that is formed on the first contact layer and has a superlattice structure; and
a second contact layer that is formed on the infrared absorption layer and has a second conductivity type, wherein
a concentration of a dopant in the first buffer layer is less than or equal to 1.0×10 17 cm −3 ;
a carrier concentration in the first buffer layer is within a range having a lower value of 1×10 18 cm −3 and an upper value of 1×10 20 cm −3 ;
a concentration of a dopant in the second buffer layer is less than or equal to 1.0×10 17 cm −3 ;
a carrier concentration in the second buffer layer is within a range having a lower value of 1×10 18 cm −3 and an upper value of 1×10 20 cm −3 ;
the first conductivity type of the first contact layer is a p-type, and the first contact layer is formed of a material including GaSb;
the infrared absorption layer has the superlattice structure that is formed by alternately stacking a GaSb layer and an InAs layer; and
the second conductivity type of the second contact layer is an n-type, and the second contact layer is formed of a material including InAs.
4. The infrared detector as claimed in claim 3 , wherein
the first buffer layer is formed of the material including GaSb and one or both of In and As; and
the second buffer layer is formed of the material including GaSb and one or both of In and As.
5. The infrared detector as claimed in claim 3 , wherein pixel separating grooves are formed in the second contact layer and the infrared absorption layer to separate pixels of the infrared detector.