Methods for selectively shielding radio frequency modules
Aspects of this disclosure relate to methods of selectively shielded radio frequency modules. A radio frequency module can be provided with a radio frequency component and an antenna. A shielding layer can be formed over a portion of the radio frequency module such that the radio frequency component is shielded by the shielding layer and the antenna is unshielded by the shielding layer.
1. A method of selectively shielding a radio frequency module, the method comprising:
providing a radio frequency module including a radio frequency component, an antenna, and wire bonds disposed between the radio frequency component and the antenna;
masking a first portion of the radio frequency module over the antenna with a masking material such that a second portion of the radio frequency module over the radio frequency component is not covered by the masking material; and
after said masking, forming a shielding layer over the radio frequency module such that (i) the radio frequency component is shielded by the shielding layer and the antenna is unshielded by the shielding layer and (ii) the shielding layer is in contact with the wire bonds to provide shielding between the radio frequency component and the antenna.
2. The method of claim 1 wherein said forming includes removing the masking material over the antenna.
3. The method of claim 1 wherein said masking includes masking the radio frequency module with the masking material and laser cutting a selected area of the masking material.
4. The method of claim 1 wherein said forming includes sputtering a conductive material and the shielding layer includes the conductive material.
5. The method of claim 4 wherein the conductive material includes copper.
6. The method of claim 4 further comprising forming a protective layer over the shielding layer such that the shielding layer is disposed between the protective layer and the radio frequency component.
7. The method of claim 6 wherein the protective layer includes titanium.
8. The method of claim 1 further comprising singulating the radio frequency module prior to said forming.
9. The method of claim 1 further comprising singulating the radio frequency module after said forming.
10. The method of claim 1 wherein the radio frequency module includes a package substrate on which the radio frequency component and the antenna are disposed, and the shielding layer is formed substantially parallel to the package substrate.
11. A method of selectively shielding a radio frequency module, the method comprising:
providing a radio frequency module including a radio frequency component and an antenna;
masking a portion of the radio frequency module over the antenna with a masking material over a molding material such that an other portion of the radio frequency module over the radio frequency component is not covered by the masking material;
forming a conductive layer over the portion of the radio frequency module and the other portion of the radio frequency module; and
removing the masking material such that a shielding layer is over the radio frequency component and the antenna is unshielded by the shielding layer, the shielding layer including conductive material of the conductive layer.
12. The method of claim 11 wherein said masking includes laser cutting a selected area of the masking material.
13. The method of claim 11 wherein the shielding layer is in contact with wire bonds disposed between the radio frequency component and the antenna after said removing.
14. The method of claim 11 wherein the molding material has substantially the same thickness over the antenna as over the radio frequency component after said removing.
15. The method of claim 11 wherein the masking material includes tape.
16. The method of claim 1 wherein the providing includes providing the radio frequency module with additional wire bonds disposed along an edge of the radio frequency module.
17. The method of claim 11 wherein said providing includes providing the radio frequency module with wire bonds disposed along an edge of the radio frequency module.
18. The method of claim 11 wherein the shielding layer is in contact with wire bonds disposed between the radio frequency component and the antenna after said removing.
19. The method of claim 11 further comprising singulating the radio frequency module prior to said forming.
20. The method of claim 11 further comprising singulating the radio frequency module after said forming.
21. The method of claim 11 further comprising forming a protective layer over the shielding layer such that the shielding layer is disposed between the protective layer and the radio frequency component.
22. The method of claim 21 wherein the protective layer includes titanium.