Electro-optical apparatus, manufacturing method thereof, and electronic device
There is provided an electro-optical apparatus including an element substrate that includes a display region in which a plurality of light-emitting elements are arranged, and a peripheral region in which a terminal is disposed. The light-emitting element has a structure in which a reflective electrode, an optical adjustment layer, a first electrode, a light-emitting layer, and a second electrode are laminated, and the first electrode is electrically connected to a contact electrode. The terminal has a structure in which a first terminal layer that is formed by a first conductive film which is the same as the reflective electrode, a second terminal layer that is formed by a second conductive film which is the same as the contact electrode, and a third terminal layer that is formed by a third conductive film which is the same as the first electrode are laminated.
1. A manufacturing method of an electro-optical apparatus having a structure that includes a display region in which a plurality of light-emitting elements are arranged in a matrix form, and a peripheral region in which a terminal is disposed outside the display region, the light-emitting element has a structure in which a reflective electrode, an optical path adjustment layer, a first electrode, a light-emitting layer, and a second electrode are laminated and the first electrode is electrically connected to a contact electrode, and the terminal is laminated with a first terminal layer, a second terminal layer, and a third terminal layer, the method comprising:
forming the reflective electrode in the display region, and forming the first terminal layer in the peripheral region by forming a first conductive film, and patterning the first conductive film;
after the forming of the reflective electrode in the display region, forming the contact electrode in the display region, and laminating the second terminal layer on the first terminal layer in the peripheral region by forming a second conductive film, and patterning the second conductive film; and
after the forming of the contact electrode in the display region, forming the first electrode in the display region, and laminating the third terminal layer on the second terminal layer in the peripheral region by forming a third conductive film, and patterning the third conductive film.
2. The manufacturing method of the electro-optical apparatus according to claim 1 ,
wherein the third conductive film includes a transparent conductive material,
the second conductive film includes a conductive material with a higher conductivity than the third conductive film, and
the first conductive film includes a reflective conductive material.
3. The manufacturing method of the electro-optical apparatus according to claim 2 ,
wherein the third conductive film includes indium tin oxide,
the second conductive film includes titanium nitride, and
the first conductive film includes aluminum and copper.