Spherical crystalline silica particles and method for producing same
Spherical crystalline silica particles having a higher productivity, lower production cost, higher coefficient of thermal expansion, higher heat transmission rate, higher fluidity, higher dispersability, higher fill factor, low abrasiveness, and higher purity compared with the past and able to be applied in the semiconductor field and a process of production of the same are provided. Spherical crystalline silica particles containing 400 to 5000 ppm of aluminum and containing 80% or more of crystal phases are provided.
1. Spherical crystalline silica particles containing 400 to 5000 ppm of aluminum, containing 80% or more of crystal phases, and containing 20 to 300 ppm of an alkali metal,
wherein the alkali metal is selected from the group consisting of lithium, sodium, potassium, rubidium, cesium and francium.
2. The spherical crystalline silica particles according to claim 1 , containing 90% or more of crystal phases.
3. The spherical crystalline silica particles according to claim 1 , wherein 95 to 100% of the crystal phases are cristobalite crystal phases.
4. The spherical crystalline silica particles according to claim 1 , wherein the cristobalite crystal phases have a phase transition start temperature of 220 to 245° C.
5. The spherical crystalline silica particles according to claim 1 , wherein an average particle size (D50) is 1 to 100 μm.
6. The spherical crystalline silica particles according to claim 1 , containing 29 to 300 ppm of the alkali metal.
7. A process of production of spherical crystalline silica particles comprising:
preparing silica powder so as to contain 400 to 5000 ppm of aluminum and contain 20 to 300 ppm of an alkali metal,
flame spraying the prepared silica powder,
holding the flame sprayed spherical silica particles at 1100 to 1600° C. for 1 to 12 hours, and
cooling the spherical silica particles to have 80% or more of crystal phases,
wherein the alkali metal is selected from the group consisting of lithium, sodium, potassium, rubidium, cesium and francium.
8. The process of production according to claim 7 , wherein the flame sprayed spherical silica particles have an average particle size (D50) of 1 to 100 μm.
9. The process of production according to claim 7 , comprising preparing said silica powder so as to contain 29 to 300 ppm of the alkali metal.