Light extraction substrate, method for manufacturing light extraction substrate, organic electroluminescent element, and method for manufacturing organic electroluminescent element
View Patent ↗Provided is a light extraction substrate capable of achieving both light extraction efficiency and preservability. Before forming a cap layer, a step of reducing in-membrane water content such that the in-membrane water content of a layer formed between a gas barrier layer and the cap layer is less than 1.0×10 15 /mg is performed. The in-membrane water content of less than 1.0×10 15 /mg is maintained until at least a step of forming the cap layer after the step of reducing the in-membrane water content, and the cap layer is then formed through a dry process.
1. A method for manufacturing a light extraction substrate having at least a gas barrier layer, a light scattering layer, and a cap layer formed in this order on a resin base material, the method comprising the steps of:
reducing an in-membrane water content in which the in-membrane water content of all layers formed between the gas barrier layer and the cap layer is made to be less than 1.0×10 15 /mg, before forming the cap layer;
maintaining the in-membrane water content of less than 1.0×10 15 /mg at least until the step of forming the cap layer, after the step of reducing the in-membrane water content; and
forming the cap layer through a dry process.
2. The method for manufacturing the light extraction substrate according to claim 1 , wherein the step of reducing the in-membrane water content performs vacuum drying.
3. The method for manufacturing the light extraction substrate according to claim 1 , wherein the dry process is a plasma CVD method.
4. The method for manufacturing the light extraction substrate according to claim 1 , wherein the cap layer containing a silicon nitride as a principal component is formed.
5. The method for manufacturing the light extraction substrate according to claim 4 , wherein the cap layer having a refractive index of 1.8 or more is formed.
6. The method for manufacturing the light extraction substrate according to claim 1 , the method comprising a step of forming a smoothing layer on the light scattering layer.
7. The method for manufacturing the light extraction substrate according to claim 1 , wherein the cap layer is formed by a multi-deposition method.
8. The method for manufacturing the light extraction substrate according to claim 1 , wherein the step of reducing in-membrane water content performs vacuum drying after curing the light scattering layer.
9. A light extraction substrate comprising:
a resin base material;
a gas barrier layer provided on the resin base material;
a light scattering layer provided on the gas barrier layer; and
a cap layer formed on the light scattering layer by a dry process, wherein
an in-membrane water content of all layers formed between the gas barrier layer and the cap layer is less than 1.0×10 15 /mg.
10. A method for manufacturing an organic electroluminescence element comprising: a step of forming a light extraction substrate having at least a gas barrier layer, a light scattering layer, and a cap layer formed in this order on a resin base material; and a step of forming electrodes and a light-emitting unit on the light extraction substrate, wherein
the step of forming the light extraction substrate includes the steps of:
reducing an in-membrane water content in which the in-membrane water content of all layers formed between the gas barrier layer and the cap layer is made to be less than 1.0×10 15 /mg, before forming the cap layer;
maintaining the in-membrane water content of less than 1.0×10 15 /mg at least until the step of forming the cap layer, after the step of reducing the in-membrane water content; and
forming the cap layer through a dry process.
11. An organic electroluminescence element comprising:
a light extraction substrate, and
a light-emitting unit including an organic functional layer sandwiched by a pair of electrodes, wherein
the light extraction substrate includes:
a resin base material;
a gas barrier layer provided on the resin base material;
a light scattering layer provided on the gas barrier layer; and
a cap layer formed on the light scattering layer by a dry process; wherein
an in-membrane water content of all layers formed between the gas barrier layer and the cap layer is less than 1.0×10 15 /mg.