Ion implantation process and ion implanted glass substrates
View Patent ↗The invention concerns a process for increasing the scratch resistance of a glass substrate by implantation of simple charge and multicharge ions, comprising maintaining the temperature of the area of the glass substrate being treated at a temperature that is less than or equal to the glass transition temperature of the glass substrate, selecting the ions to be implanted among the ions of Ar, He, and N, setting the acceleration voltage for the extraction of the ions at a value comprised between 5 kV and 200 kV and setting the ion dosage at a value comprised between 10 14 ions/cm 2 and 2.5×10 17 ions/cm 2 .The invention further concerns glass substrates comprising an area treated by implantation of simple charge and multicharge ions according to this process and their use for reducing the probability of scratching on the glass substrate upon mechanical contact.
1. A process for increasing the scratch resistance of a glass substrate, the process comprising:
maintaining the temperature of the area of the glass substrate being treated at a temperature that is less than or equal to the glass transition temperature of the glass substrate,
setting the acceleration voltage for the extraction of nitrogen simple charge or multicharge ions at a value comprised between 25 kV and 60 kV,
setting an ion dosage at a value comprised between 10 14 ions/cm 2 and 10 17 ions/cm 2 , and
implanting, within the glass, the nitrogen simple charge and multicharge ions.
2. A process according to claim 1 , wherein the acceleration voltage is set at a value comprised between 25 kV and 35 kV.
3. A process according to claim 2 , wherein the ion dosage is set at a value comprised between 5.0×10 14 ions/cm 2 and 10 17 ions/cm 2 .
4. A process according to claim 1 , wherein the glass substrate is selected among soda-lime glass and aluminosilicate glass.
5. A process according to claim 2 , wherein the ion dosage is set at a value comprised between 2.5×10 14 ions/cm 2 and 10 17 ions/cm 2 .
6. A process according to claim 2 , wherein the ion dosage is set at a value comprised between 2.5×10 15 ions/cm 2 and 5×10 16 ions/cm 2 .