Pressure measurement cell
A pressure measurement cell is disclosed including a base body, substantially cylindrical at least in sections, a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane, and a joining material that joins the perimeter joint between the base body and the measuring membrane. The base body and/or the measuring membrane have/has a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane.
1. A pressure measurement cell comprising:
a base body, substantially cylindrical, at least in sections;
a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane; and
a joining material that joins the perimeter joint between the base body and the measuring membrane,
wherein the base body and/or the measuring membrane includes a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane, wherein the stepped recess has a step height of at least 12 micrometers.
2. The pressure measurement cell of claim 1 , wherein the base body and/or the measuring membrane comprise a ceramic material.
3. The pressure measurement cell of claim 2 , wherein the ceramic material is aluminum oxide.
4. The pressure measurement cell of claim 1 , wherein the joining material comprises an active solder foil.
5. The pressure measurement cell of claim 4 , wherein the active solder foil comprises a zirconium-nickel-titanium alloy.
6. The pressure measurement cell of claim 4 , wherein the active solder foil has a thickness of at least 25 micrometers.
7. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of at least 16 micrometers.
8. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of at least 18 micrometers.
9. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of no more than 40 micrometers.
10. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of no more than 30 micrometers.
11. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of no more than 20 micrometers.
12. The pressure measurement cell of claim 1 , wherein the minimum distance is at least 5 micrometers.
13. The pressure measurement cell of claim 1 , wherein the minimum distance is at least 7 micrometers.
14. The pressure measurement cell of claim 1 , wherein the minimum distance is at least 9 micrometers.
15. The pressure measurement cell of claim 1 , wherein the minimum distance is no more than 15 micrometers.
16. The pressure measurement cell of claim 1 , wherein the minimum distance is no more than 13 micrometers.
17. The pressure measurement cell of claim 1 , wherein the minimum distance is no more than 12 micrometers.
18. The pressure measurement cell of claim 1 , the pressure measurement cell further comprising a transducer structured to convert a pressure-dependent position of the measuring membrane into a pressure-dependent signal.
19. The pressure measurement cell of claim 18 , wherein the transducer is a capacitive transducer that generates the pressure-dependent signal using a capacitance between a membrane electrode on the measuring membrane facing the base body and a measurement electrode on the base body facing the measuring membrane.