POWDER FOR FILM FORMATION AND MATERIAL FOR FILM FORMATION
The present invention relates a coating powder comprising a rare earth oxyfluoride (Ln-O—F) and having: an average particle size (D 50 ) of 0.1 to 10 μm, a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1 rays.
1 . A coating powder comprising a rare earth oxyfluoride (Ln-O—F) and having:
an average particle size (D 50 ) of 0.1 to 10 μm,
a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and
a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1 rays.
2 . The coating powder according to claim 1 , having an average particle size (D 50 ) of 0.2 to 5 μm, a dispersion index of 0.7 or smaller, and an aspect ratio of 1.0 to 3.0.
3 . The coating powder according to claim 1 , having a fluorine concentration of 30% by mass or lower.
4 . The coating powder according to claim 1 , showing a pore size peak in the range of from 0.1 μm to 5 μm in the pore size distribution of pores having a diameter of 10 μm or smaller measured by mercury intrusion porosimetry with pore size as abscissa and log differential pore volume as ordinate.
5 . The coating powder according to claim 1 , comprising a rare earth fluoride (LnF 3 ) in addition to the rare earth oxyfluoride (Ln-O—F).
6 . The coating powder according to claim 1 , having a dispersion index of 0.7 or smaller.
7 . The coating powder according to claim 1 , having a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 0.10 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1 rays.
8 . The coating powder according to claim 1 , having a ratio of the number of moles of oxygen (O) per kg of the powder to the number of moles of the rare earth (Ln) per kg of the powder, O/Ln by mole, of 0.03 to 1.1.
9 . The coating powder according to claim 1 , wherein the rare earth is at least one element selected from yttrium (Y), cerium (Ce), samarium (Sm), gadolinium (Gd), dysprosium (Dy), erbium (Er), and ytterbium (Yb).
10 . The coating powder according to claim 9 , wherein the rare earth is yttrium (Y).
11 . The coating powder according to claim 1 , being used to form a coating by physical vapor deposition, aerosol deposition, or thermal spraying.
12 . The coating powder according to claim 11 , wherein the physical vapor deposition is vacuum evaporation or ion plating.
13 . A coating material comprising the coating powder according to claim 1 .
14 . The coating material according to claim 13 , being in the form of slurry.
15 . The coating material according to claim 14 , being used to form a coating by thermal spraying.
16 . A coating material comprising a sintered compact of the coating powder according to claim 1 .
17 . The coating material according to claim 16 , being used to form a coating by physical vapor deposition.
18 . The coating material according to claim 17 , wherein the physical vapor deposition is vacuum evaporation, ion plating, or sputtering.
19 . A method comprising using a powder comprising a rare earth oxyfluoride (Ln-O—F) as a raw material for forming a coating,
the powder having:
an average particle size (D 50 ) of 0.1 to 10 μm,
a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and
a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1 rays.
20 . A method for forming a coating, comprising using a powder comprising a rare earth oxyfluoride (Ln-O—F),
the powder having:
an average particle size (D 50 ) of 0.1 to 10 μm,
a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and
a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1 rays.