Scintillator
The present invention is in the field of an improved scintillator for X-rays, use of the inventive scintillator, an X-ray detector comprising the present scintillator, and a method of producing an improved scintillator. A scintillator converts X-rays into visible light; high performance scintillators are typically made of a crystalline material.
1. A scintillator for X-rays, the scintillator comprising:
a substrate plate layer;
a first moisture barrier layer; and
and a scintillator layer between the substrate plate layer and the first moisture barrier layer; and
a levelling layer on the scintillator layer and between the scintillator layer and the first moisture barrier layer, wherein the levelling layer covers spaces defined by pillars of the scintillator layer;
wherein the first moisture barrier layer has a thickness of between 10 nanometers (nm) and 1000 nm, and the first moisture barrier layer comprises two or more layers each individually having a thickness of between 0.5 nm and 100 nm wherein at least one subsequent layer is different from a previous layer.
2. The scintillator according to claim 1 , wherein the substrate plate layer is selected from an aluminum (Al) plate, a fiber optic plate, and a carbon plate.
3. The scintillator according to claim 1 , wherein a scintillating material of the scintillator layer material is selected from crystalline caesium iodide (CsI), and thallium iodide (T1I), such as doped or undoped Cs1.
4. The scintillator according to claim 1 , wherein the scintillating material of the scintillator layer is a pillar type structure.
5. The scintillator according to claim 1 , wherein the first moisture barrier layer comprises 3-50 layers, and wherein the first moisture barrier layer has a thickness between 20 nm-500 nm.
6. The scintillator according to claim 1 , wherein the scintillator layer is covered with an adhesion layer.
7. The scintillator according to claim 1 , further comprising: one or more of a first protective layer, a second protective layer, and a second moisture barrier layer, and wherein the levelling layer has a thickness of 1-5% of a thickness of the scintillator layer.
8. The scintillator according to claim 1 , wherein the first moisture barrier layer and a second moisture barrier layer comprise layers, each layer comprising a material, individually selected from metals, metal oxides, metal nitrides.
9. The scintillator according to claim 6 , wherein the adhesion layer comprises a material selected from saturated linear and branched hydrosilicons.
10. The scintillator according to claim 1 , wherein the levelling layer comprises a material selected from aromatic polymers.
11. The scintillator according to claim 1 , further comprising a first and second protective layer comprising a material, each individually, selected from aromatic polymers.
12. Use of the scintillator according to claim 1 for non-destructive applications, for medical applications, or for orthopedics.
13. An X-ray detector comprising the scintillator according to claim 1 and a sensor.
14. A method of producing an improved scintillator, comprising the steps of:
providing a substrate plate layer, and a scintillator layer,
depositing a levelling layer on the scintillator layer, wherein the levelling layer covers spaces defined by pillars of the scintillator layer; and
depositing a first hermetic moisture barrier layer over the levelling layer by using atomic layer deposition (ALD), wherein the scintillator layer is positioned between the substrate plate layer and the first hermetic moisture barrier layer and the first hermetic moisture barrier layer has a thickness of 10 nanometers (nm)-1000 nm, and the first moisture barrier layer comprises two or more layers each individually having a thickness of 0.5 nm-100 nm.
15. The method according to claim 14 , further comprising depositing an adhesion layer.
16. The method according to claim 14 , further comprising one or more steps of:
depositing a first protective layer,
depositing a second protective layer, and
depositing a second moisture barrier layer.
17. The method according to claim 16 , wherein the depositing of the first protective layer or a second protective layer uses a chemical vapor deposition (CVD) or ALD.
18. The method according to claim 14 , further comprising providing a reflector between the substrate plate layer and the scintillator layer.
19. The method according to claim 14 , wherein the first moisture barrier layer comprises 3-50 layers, and wherein the first moisture barrier layer has a thickness of 20 nm-500 nm.
20. The method according to claim 14 , wherein:
the substrate plate layer is selected from an aluminum (Al) plate, a fiber optic plate, and a carbon plate, and
a scintillating material of the scintillator layer is selected from crystalline caesium iodide (CsI), and thallium iodide (T1I), such as doped or undoped CsI.