MASKING DEVICE FOR USE IN A LITHIUM DEPOSITION PROCESS IN THE MANUFACTURING OF THIN FILM BATTERIES, APPARATUS CONFIGURED FOR A LITHIUM DEPOSITION PROCESS, METHOD FOR MANUFACTURING ELECTRODES OF THIN FILM BATTERIES, AND THIN FILM BATTERY
The present disclosure provides a masking device for use in a lithium deposition process in the manufacturing of thin film batteries. The masking device includes a mask portion made of a metal or metal alloy, and one or more openings in the mask portion, wherein the one or more openings are configured to allow particles of a deposition material to pass through the mask portion, and wherein a size of each opening of the one or more openings, is at least 0.5 cm2.
1 . A masking device for use in a lithium deposition process in the manufacturing of thin film batteries, comprising:
a mask portion made of a metal or a metal alloy; and
one or more openings in the mask portion allowing particles of a deposition material to pass through the mask portion, and a size of each opening of the one or more openings being at least 0.5 cm 2 .
2 . The masking device of claim 1 , wherein the size of each opening of the one or more openings is in a range of 0.5 cm 2 to 50 cm 2 .
3 . The masking device of claim 1 , wherein the masking device forms electrodes of a plurality of thin film batteries.
4 . The masking device of claim 1 , further including an insulator provided at the mask portion.
5 . The masking device of claim 4 , wherein the insulator includes at least one of a ceramic material and polytetrafluorethylen.
6 . The masking device of claim 4 , wherein the mask portion has a first side and a second side, the first side being configured to face a substrate during the lithium deposition process, the second side being configured to face a deposition source during the lithium deposition process, and the insulator being provided at least at the first side of the mask portion.
7 . The masking device of claim 4 , wherein the insulator has one or more insulator openings that correspond to the one or more openings in the mask portion.
8 . The masking device of claim 7 , wherein each opening of the one or more insulator openings has a size that is equal to or larger than the size of the one or more openings in the mask portion.
9 . The masking device of claim 4 , wherein the mask portion and the insulator are provided as separate entities.
10 . The masking device of claim 4 , wherein the mask portion is provided as a coating on the insulator.
11 . The masking device of claim 1 , wherein the metal or metal alloy of the mask portion is selected from the group consisting of: stainless steel, molybdenum, aluminum, iron, chromium, and any combination thereof.
12 . An apparatus configured for a lithium deposition process, comprising:
one or more deposition sources; and
one or more masking devices for use in a lithium deposition process in the manufacturing of thin film batteries comprising:
a mask portion made of a metal or a metal alloy; and
one or more openings in the mask portion allowing particles of a deposition material to pass through the mask portion, and a size of each opening of the one or more openings being at least 0.5 cm 2 .
13 . A method for manufacturing electrodes of thin film batteries in a lithium deposition process, comprising:
positioning the masking device for use in a lithium deposition process in the manufacturing of thin film batteries with respect to a substrate, the masking device comprising:
a mask portion made of a metal or a metal alloy; and
one or more openings in the mask portion allowing particles of a deposition material to pass through the mask portion, and a size of each opening of the one or more openings being at least 0.5 cm 2 ; and
depositing lithium or a lithium alloy on the substrate through the one or more openings in the mask portion to form the electrodes of the thin film batteries.
14 . The method of claim 13 , wherein the lithium deposition process is conducted using sputtering or thermal evaporation.
15 . A thin film battery, including an electrode manufactured using the method for manufacturing electrodes of thin film batteries in a lithium deposition process, the method comprising:
positioning the masking device for use in a lithium deposition process in the manufacturing of thin film batteries with respect to a substrate, the masking device comprising:
a mask portion made of a metal or a metal alloy; and
one or more openings in the mask portion allowing particles of a deposition material to pass through the mask portion, and a size of each opening of the one or more openings being at least 0.5 cm 2 ; and
depositing lithium or a lithium alloy on the substrate through the one or more openings in the mask portion to form the electrodes of the thin film batteries.
16 . The thin film battery according to claim 15 , wherein the lithium deposition process is conducted using sputtering or thermal evaporation.
17 . The apparatus according to claim 12 , wherein the size of each opening of the one or more openings is in a range of 0.5 cm 2 to 50 cm 2 .
18 . The apparatus according to claim 12 , wherein the masking device forms electrodes of a plurality of thin film batteries.
19 . The apparatus according to claim 12 , further including an insulator provided at the mask portion.
20 . The apparatus according to claim 19 , wherein the insulator includes at least one of a ceramic material and polytetrafluorethylene.