Semiconductor storage device
According to one embodiment, a semiconductor storage device of an embodiment of the present disclosure is provided with peripheral circuits, a memory cell array, upper bit lines, and first and second connecting parts. The memory cell array is disposed above the peripheral circuit, and includes at least first and second regions. The upper bit lines extend in a first direction and are above the memory cell array. The first and second connecting parts are respectively provided with contact plugs, and one of these connecting parts is formed between first and second regions. The upper bit lines includes a first group of upper bit lines which are connected to the peripheral circuits via the first connecting part, and a second group of upper bit lines which are connected to the peripheral circuits via the second connecting part.
1. A semiconductor storage device, comprising:
a peripheral circuit on a semiconductor substrate;
a memory cell array above the peripheral circuit in a first direction, the memory cell array including first to third regions, each of first to third regions arranged along a second direction crossing the first direction, each region including a plurality of memory strings, the second region being between the first region and the third region;
a plurality of first contact plugs provided in a first connection region that is between the first region and the second region;
a plurality of second contact plugs provided in a second connection region that is spaced apart from the first connection region in the second direction; and
a plurality of bit lines above the memory cell array in the first direction and extending in the second direction, each of the bit lines connected to at least one of the memory strings in the first region, one of the memory strings in the second region and one of the memory strings in the third region, the bit lines including a plurality of first bit lines and a plurality of second bit lines, each of the second bit lines being adjacent to one of the first bit lines in a third direction crossing the first direction and the second direction, wherein
the first bit lines are electrically connected to the peripheral circuit via the first contact plugs and not the second contact plugs, and the second bit lines are electrically connected to the peripheral circuit via the second contact plugs and not the first contact plugs.
2. The semiconductor storage device of claim 1 , wherein:
the second connection region is between the second region and third region.
3. The semiconductor storage device of claim 1 , further comprising:
a plurality of bit lines below the memory cell array in the first direction and extending in the second direction, the bit lines including a plurality of third bit lines and a plurality of fourth bit lines, wherein
the first contact plugs are electrically connected to a first group of sense amplifiers via the third bit lines, and the second contact plugs are electrically connected to a second group of sense amplifiers via the fourth bit lines.
4. The semiconductor storage device of claim 3 , wherein the third and fourth bit lines are electrically connected to the first contact plugs and extend away from the first contact plugs, in opposite directions.
5. The semiconductor storage device of claim 4 , wherein the third and fourth bit lines are electrically connected to the first contact plugs in an alternating manner.
6. The semiconductor storage device of claim 1 , wherein the peripheral circuit include a low voltage circuit and a high voltage circuit, and the bit lines are connected to the high voltage circuit.
7. The semiconductor storage device of claim 1 , wherein
the peripheral circuit include first and second low voltage circuits and first and second high voltage circuits, the first low voltage circuit provided between the first high voltage circuit and the second high voltage circuit, the second high voltage circuit provided between the first low voltage circuit and the second low voltage circuit, and
the first bit lines are electrically connect to the first high voltage circuit and the second bit lines are electrically connected to the second high voltage circuit.
8. The semiconductor storage device of claim 7 , further comprising:
a plurality of bit lines below the memory cell array in the first direction and extending in the second direction, the bit lines including a plurality of third bit lines and a plurality of fourth bit lines, wherein
the first contact plugs are electrically connected to a first group of sense amplifiers via the third bit lines, and the second contact plugs are electrically connected to a second group of sense amplifiers via the fourth bit lines.
9. The semiconductor storage device of claim 8 , wherein
the third bit lines are electrically connected to the first high voltage circuit and the first low voltage circuit, and
the fourth bit lines are electrically connected to the second high voltage circuit and the second low voltage circuit.
10. The semiconductor storage device of claim 1 , wherein
the first contact plugs are arranged along a line in the first connection region and the second contact plugs are arranged along a line in the second connection region.
11. A semiconductor storage device, comprising:
a peripheral circuit on a semiconductor substrate;
a memory cell array above the peripheral circuit, the memory cell array including first to third regions, each region including a plurality of memory strings, the second region being between the first region and the third region;
a plurality of first contact plugs provided in a first connection region that is between the first region and the second region;
a plurality of second contact plugs provided in a second connection region that is spaced apart from the first connection region in a first direction; and
a plurality of bit lines extending in the first direction, the bit lines including first and second upper bit lines that are above the memory cell array and first and second lower bit lines that are below the memory cell array, each of the second upper bit lines being adjacent to one of the first upper bit lines in a second direction crossing the first direction, wherein
the first upper bit lines are electrically connected to the peripheral circuit via the first contact plugs and not the second contact plugs, and the second upper bit lines are electrically connected to the peripheral circuit via the second contact plugs and not the first contact plugs.
12. The semiconductor storage device of claim 11 , wherein:
the second connection region is between the second region and third region.
13. The semiconductor storage device of claim 11 , further comprising:
the first contact plugs are electrically connected to a first group of sense amplifiers via the first lower bit lines, and the second contact plugs are electrically connected to a second group of sense amplifiers via the second lower bit lines.
14. The semiconductor storage device of claim 13 , wherein the first and second lower bit lines are electrically connected to the first contact plugs and extend away from the first contact plugs, in opposite directions.
15. The semiconductor storage device of claim 14 , wherein the first and second lower bit lines are electrically connected to the first contact plugs in an alternating manner.
16. The semiconductor storage device of claim 11 , wherein the peripheral circuit include a low voltage circuit and a high voltage circuit, and the bit lines are connected to the high voltage circuit.
17. The semiconductor storage device of claim 11 , wherein
the peripheral circuit include first and second low voltage circuits and first and second high voltage circuits, the first low voltage circuit provided between the first high voltage circuit and the second high voltage circuit, the second high voltage circuit provided between the first low voltage circuit and the second low voltage circuit, and
the first upper bit lines are electrically connect to the first high voltage circuit and the second upper bit lines are electrically connected to the second high voltage circuit.
18. The semiconductor storage device of claim 17 , wherein
the first contact plugs are electrically connected to a first group of sense amplifiers via the first lower bit lines, and the second contact plugs are electrically connected to a second group of sense amplifiers via the second lower bit lines.
19. The semiconductor storage device of claim 18 , wherein
the first lower bit lines are electrically connected to the first high voltage circuit and the first low voltage circuit, and
the second lower bit lines are electrically connected to the second high voltage circuit and the second low voltage circuit.
20. The semiconductor storage device of claim 11 , wherein
the first contact plugs form a straight line in the first connection region and the second contact plugs form a straight line in the second connection region.