IP Library Granted Patent US 10,604,843
Granted Patent B2
US 10,604,843 · App. 15/591,959 · Granted Mar 31, 2020

High registration particles-transferring system

Inventors: Yunda Wang (Milpitas, CA); Sourobh Raychaudhuri (Mountain View, CA); JengPing Lu (Fremont, CA); Eugene M. Chow (Palo Alto, CA); Julie A. Bert (East Palo Alto, CA); David Biegelsen (Portola Valley, CA); George A. Gibson (Fairport, NY); Jamie Kalb (Mountain View, CA)
Assignees: XEROX CORPORATION; PALO ALTO RESEARCH CENTER INCORPORATED
C23C16/50H01L21/67271H01L21/67282H01L21/67294H01L24/75H01L24/95H01L2224/95001H01L2224/95101H01L2224/95115H01L2224/95144H01L2224/95145H01L2924/10253H01L2924/1434H01L2924/1461
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Quick Facts
Patent No.
US 10,604,843
App. No.
15/591,959
Granted
Mar 31, 2020
Kind
B2
Abstract

Disclosed herein are implementations of a particles-transferring system, particle transferring unit, and method of transferring particles in a pattern. In one implementation, a particles-transferring system includes a first substrate including a first surface to support particles in a pattern, particle transferring unit including an outer surface to be offset from the first surface by a first gap, and second substrate including a second surface to be offset from the outer surface by a second gap. The particle transferring unit removes the particles from the first surface in response to the particles being within the first gap, secures the particles in the pattern to the outer surface, and transports the particles in the pattern. The second substrate removes the particles in the pattern from the particle transferring unit in response to the particles being within the second gap. The particles are to be secured in the pattern to the second surface.

Claims (33)

1. A particle transferring unit comprising:

a transferring unit substrate;

a first electrode on the substrate;

a dielectric layer on the first electrode; and

a second electrode on the dielectric layer, wherein the first electrode and the second electrode are to form an electric field to remove a plurality of particles in a pattern from a first substrate, secure the plurality of particles in the pattern to the particle transferring unit, and transfer the plurality of particles in the pattern to a second substrate.

2. The particles-transferring unit of claim 1 , wherein:

the first substrate is to support the plurality of particles in a liquid;

the plurality of particles have an electric charge;

the particle transferring unit is to generate an electric field; and

the particle transferring unit is to remove the plurality of particles from the liquid and secure the plurality of particles via an electrical force.

3. The particles-transferring unit of claim 1 , wherein the second substrate comprises a second surface and wherein:

the second surface comprises a tacky surface comprising one or more of adhesive, photoresist, polymers, silicon, or polydimethylsiloxane; and

the second substrate is to remove the plurality of particles from the particle transferring unit and secure the plurality of particles to the second surface in response to the plurality of particles contacting the tacky surface.

4. The particle transferring unit of claim 1 , wherein:

the first electrode is a continuous layer;

the second electrode comprises a grid pattern comprising a first electrode grid and a second electrode grid;

the first electrode grid is to be powered independently from the second electrode grid to modulate the electric field locally; and

the electric field creates an electric force to remove the plurality of particles from the first substrate and secure the plurality of particles on the particle transferring unit.

5. The particle transferring unit of claim 1 further comprising a plurality of integrated photosensitive switches to power the particle transferring unit optically.

6. The particle transferring unit of claim 1 , wherein:

the transferring unit substrate is flexible and coupled to one or more rollers; and

the substrate is rotated over the rollers to remove and transport the plurality of particles.

7. The particle transferring unit of claim 1 , wherein:

the transferring unit substrate is coupled to one or more flexible joints;

the transferring unit substrate is positioned, by the one or more flexible joints, on the first substrate to remove the plurality of particles from the first substrate; and

the transferring unit substrate is positioned, by the one or more flexible joints, on the second substrate to transfer the plurality of particles to the second substrate.

8. The particle transferring unit of claim 7 , wherein the one or more flexible joints comprises one or more of a universal joint, a compliant joint, or a joint with springs.

9. The particle transferring unit of claim 1 , wherein:

the transferring unit substrate is a rigid curved substrate comprising an axis; and

the transferring unit substrate is rotated about the axis to remove the plurality of particles from the first substrate and to transport the plurality of particles to the second substrate.

10. The particle transferring unit of claim 1 , wherein:

one or more spacers are to provide a gap between the first substrate and the particle transferring unit; and

the particle transferring unit is to manipulate the one or more spacers.

Assignments (12)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073562/0677 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
CONFIRMATORY LICENSE Recorded Dec 1, 2023
From: PALO ALTO RESEARCH CENTER, INCORPORATED
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 065746/0131 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
CONFIRMATORY LICENSE Recorded Jul 14, 2021
From: PALO ALTO RESEARCH CENTER INC
To: THE GOVERNMENT OF THE UNITED STATES AS REPRSENTED BY THE SECRETARY OF THE AIR FORCE
Reel/Frame 056862/0583 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2017
From: WANG, YUNDA; RAYCHAUDHURI, SOUROBH; LU, JENGPING; CHOW, EUGENE M.; BERT, JULIE A.; BIEGELSEN, DAVID; KALB, JAMIE; GIBSON, GEORGE A.
To: XEROX CORPORATION; PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 042329/0919 →
Continuity (1)
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