Light-emitting device having patterned substrate and method of manufacturing thereof
A light-emitting device disclosed herein comprises a patterned substrate having a plurality of cones, wherein a space is between two adjacent cones. A light-emitting stack formed on the cones. Furthermore, the cones comprise an area ratio of a top area of the cone and a bottom area of the cone which is less than 0.0064.
1. A light-emitting device, comprising:
a patterned substrate having a plurality of cones, wherein each of the plurality of cones comprises a top having a top width, a bottom having a bottom width, a sidewall between the top and the bottom, and a height H, wherein an area ratio of the top and to the bottom of the cone is less than 0.0064, and H>1.5 μm and the top width is larger than zero; and a light-emitting stack formed on the cones, wherein the light-emitting stack comprises a first conductivity-type semiconductor layer, an active layer, and a second conductivity-type semiconductor layer.
2. The light-emitting device according to claim 1 , wherein the sidewall between the top and the bottom is inclined.
3. The light-emitting device according to claim 1 , wherein the a shape of the top comprises a circle.
4. The light-emitting device according to claim 1 , wherein the a shape of the bottom comprises a circle.
5. The light-emitting device according to claim 2 , wherein a cross-section of the inclined sidewall comprises an arc with a chord protruded outward.
6. The light-emitting device according to claim 1 , further comprising an intermediate layer having a refractive index formed on the patterned substrate.
7. The light-emitting device according to claim 6 , wherein the top width is smaller than the a quotient of the a wavelength of light emitted from the light-emitting device divided by the refractive index of the intermediate layer.
8. The light-emitting device according to claim 1 , wherein the top width of the cone is smaller than 0.1 μm.
9. The light-emitting device according to claim 5 , further comprising a distance between two of the adjacent cones, wherein the distance is between 0.1-0.4 μm.
10. The light-emitting device according to claim 2 , wherein an angle between the bottom of the cone and the chord of the arc is between 40-60 degrees.
11. The light-emitting device according to claim 9 , wherein a maximum distance between the arc and the chord of the arc is smaller than 0.5 μm.
12. The light-emitting device according to claim 1 , wherein a first ratio of the top width of the cone to the bottom width of the cone is smaller than 0.08.
13. The light-emitting device according to claim 1 , wherein at least one of the cones satisfies 0.4<H/(D 1 +S)<=0.6, wherein D 1 represents the bottom width of the cone, and S represents the distance between two of the adjacent cones.
14. The light-emitting device according to claim 9 , wherein at least one of the cones satisfies 0.01<S/(D 1 +S)<0.3, wherein D 1 represents the top width of the cone, and S represents the distance between two of the adjacent cones.
15. The light-emitting device according to claim 11 , wherein at least one of the cones satisfies 0<B/(D I D1+S)<=0.2, wherein D 1 represents the top bottom width of the cone, B represents the maximum distance of the arc and the chord of the arc, and S represents the distance between two of the adjacent cones.
16. The light-emitting device according to claim 1 , wherein the area of the top of the cone is zero.
17. The light-emitting device according to claim 1, wherein each of the plurality of cones is disposed on the patterned substrate in a predetermined period.
18. The light-emitting device according to claim 17, wherein the predetermined period comprises a fixed period, a variable period, or a quasi-period.
19. A light-emitting device, comprising:
a substrate comprising a plurality of cones, wherein each of the plurality of cones comprises a top having a top width, a bottom having a bottom width, a sidewall between the top and the bottom, and a height H, wherein an area ratio of the top to the bottom of the cone is less than 0.0064, and H>1.5 μm; and
wherein a cross-section of the sidewall comprises an arc with a chord protruded outward, and the one of the plurality of cones satisfies 0<B/(D1+S)<=0.2;
wherein D1 represents the bottom width, B represents a maximum distance between the arc and the chord, and S represents a distance between the one of the plurality of cones and another one of the plurality of cones adjacent to the one of the plurality of cones.
20. The light-emitting device according to claim 19, wherein an angle between the bottom and the chord of the arc is between 40-60 degrees.
21. The light-emitting device according to claim 19, wherein the maximum distance between the arc and the chord is smaller than 0.5 μm.
22. The light-emitting device according to claim 19, wherein a ratio of the top width to the bottom width is smaller than 0.08, and the top width is larger than zero.
23. The light-emitting device according to claim 19, wherein the one of the plurality of cones satisfies 0.4<H/(D1+S)<=0.6.
24. The light-emitting device according to claim 19, wherein the one of the plurality of cones satisfies 0.01<S/(D1+S)<0.3.
25. A light-emitting device, comprising:
a patterned substrate having a plurality of cones, wherein each of the plurality of cones comprises a top having a top width, a bottom having a bottom width, a sidewall between the top and the bottom, and a height H, wherein an area ratio of the top to the bottom of the cone is less than 0.0064, and H>1.5 μm; and
an intermediate layer having a refractive index formed on the patterned substrate;
wherein the top width is smaller than a quotient of a wavelength of light emitted from the light-emitting device divided by the refractive index of the intermediate layer, and the top width is larger than zero.
26. The light-emitting device according to claim 25, wherein a cross-section of the sidewall comprises an arc with a chord protruded outward, and an angle between the bottom and the chord of the arc is between 40-60 degrees.
27. The light-emitting device according to claim 25, wherein a maximum distance between the arc and the chord of the arc is smaller than 0.5 μm.
28. The light-emitting device according to claim 25, wherein a ratio of the top width to the bottom width is smaller than 0.08.
29. The light-emitting device according to claim 25, wherein the one of the plurality of cones satisfies 0.4<H/(D1+S)<=0.6, wherein D1 represents the bottom width, and S represents a distance between the one of the plurality of cones and another one of the plurality of cones adjacent to the one of the plurality of cones.
30. The light-emitting device according to claim 25, wherein the one of the plurality of cones satisfies 0.01<S/(D1+S)<0.3, wherein D1 represents the bottom width, and S represents a distance between the one of the plurality of cones and another one of the plurality of cones adjacent to the one of the plurality of cones.
31. The light-emitting device according to claim 30, wherein 0.03<S/(D1+S)<0.15.
32. The light-emitting device according to claim 25, wherein an area ratio of the top to the bottom is less than 0.0064.