Method of manufacturing a display device and a display device
View Patent ↗A method of manufacturing a display device, includes steps of forming a first inorganic film, forming a first organic film so as to cover the first inorganic film, removing a part of the first organic film, forming a second inorganic film so as to cover the first inorganic film and a region of the first organic film that has not been removed in the step of removing the part of the first organic film, forming a second organic film so as to cover the second inorganic film, removing a part of the second organic film, and forming a third inorganic film so as to cover the second inorganic film and a region of the second organic film that has not been removed in the step of removing the part of the second organic film. A thickness of the first organic film is different from that of the second organic film.
1. A method of manufacturing a display device including a plurality of pixels, comprising steps of:
forming a first inorganic film;
forming a first organic film so as to cover the first inorganic film;
removing a part of the first organic film;
forming a second inorganic film so as to cover the first inorganic film and a region of the first organic film that has not been removed in the step of removing the part of the first organic film;
forming a second organic film so as to cover the second inorganic film;
removing a part of the second organic film; and
forming a third inorganic film so as to cover the second inorganic film and a region of the second organic film that has not been removed in the step of removing the part of the second organic film,
wherein a thickness of the first organic film is different from that of the second organic film.
2. The method of manufacturing a display device according to claim 1 , further comprising a step of forming a rib at a peripheral part of the pixels,
wherein the first inorganic film is formed over the rib.
3. The method of manufacturing a display device according to claim 1 ,
wherein one of the first organic film and the second organic film is formed to have a thickness of 70 nm to 500 nm, and the other one is formed to have a thickness of 0.8 μm to 3.0 μm.
4. The method of manufacturing a display device according to claim 2 ,
wherein the first organic film is formed to be thinner than a thickness of the rib,
the second organic film is formed to be planarized by filling a convex part constituted by a horizontal surface and an inclined surface of the second inorganic film, and
the part of the second organic film is removed so that an upper surface of the second organic film is positioned lower than a top surface of the second inorganic film over a top surface of the rib.
5. The method of manufacturing a display device according to claim 2 ,
wherein the first organic film is formed to planarize a concave part constituted by a horizontal surface and an inclined surface of the first inorganic film by filling it,
the part of the first organic film is removed so that an upper surface of the first organic film is positioned lower than that of the first inorganic film over a top surface of the rib, and
the second organic film is formed to be thinner than a thickness of the rib.
6. The method of manufacturing a display device according to claim 1 ,
wherein the step of removing the part of the first organic film or the step of removing the part of the second organic film is performed so as to comprise ashing.