IP Library Granted Patent US 11,141,752
Granted Patent B2
US 11,141,752 · App. 15/607,137 · Granted Oct 12, 2021

Techniques for arrayed printing of a permanent layer with improved speed and accuracy

Inventors: Michael Baker (Santa Cruz, CA); Nahid Harjee (Sunnyvale, CA); Douglas Bacon (Palo Alto, CA)
Assignee: KATEEVA, INC.
B05B12/12B05B1/02B41J2/04581B41J2/04588B41J2/04593B41J2/2135H01L51/56B41J2/04505H01L51/0005
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Quick Facts
Patent No.
US 11,141,752
App. No.
15/607,137
Granted
Oct 12, 2021
Kind
B2
Abstract

A repeatable manufacturing process uses a printer to deposits liquid for each product carried by a substrate to form respective thin films. The liquid is dried, cured or otherwise processed to form from the liquid a permanent layer of each respective product. To perform printing, each newly-introduced substrate is roughly mechanically aligned, with an optical system detecting sub-millimeter misalignment, and with software correcting for misalignment. Rendering of adjusted data is performed such that nozzles are variously assigned dependent on misalignment to deposit droplets in a regulated manner, to ensure precise deposition of liquid for each given area of the substrate. For example, applied to the manufacture of flat panel displays, software ensures that exactly the right amount of liquid is deposited for each “pixel” of the display, to minimize likelihood of visible discrepancies in the resultant display.

Claims (53)

1. A method of fabricating a layer on a substrate, the layer to form part of a product, the method comprising:

receiving the substrate;

disposing the substrate on a flotation table;

using a printer to deposit droplets of liquid from nozzles of a print head within a predetermined deposition area of the substrate; and

processing the liquid once deposited within the predetermined deposition area to dry or cure the liquid to form the layer;

wherein the method further comprises

detecting misalignment of the substrate, the misalignment relative to an intended orientation of the substrate during a scan of the substrate relative to the print head,

generating printer control data to govern use of the printer to deposit the droplets, the printer control data comprising a nozzle firing instruction for at least one of the nozzles of the print head selected in dependence on the detected misalignment, the printer control data representing a selection of one or more nozzles including the at least one of the nozzles, based on an expected droplet volume from each of the selected nozzles determined from empirical measurement of at least one droplet produced by each selected nozzle during a calibration operation, to produce an expected aggregate volume of the liquid from the nozzle selection that is within both the predetermined volume tolerance range and the predetermined deposition area, notwithstanding the misalignment, and

printing according to the printer control data, notwithstanding the misalignment.

2. The method of claim 1 , wherein detecting misalignment comprises detecting rotational error of the predetermined deposition area relative to a direction of transport of the substrate relative to the print head during the scan.

3. The method of claim 2 , wherein the substrate bears an optical fiducial, wherein detecting misalignment comprises imaging the optical fiducial using an image detection system, and wherein generating the printer control data comprises (a) retrieving from non-transitory storage a predetermined set of one or more preplanned scan paths represented by the printer control data, and default nozzle firing instructions, and (b) changing default nozzle firing instructions for at least two of the nozzles of the print head to be used in connection with a preplanned scan path, so as to print into the predetermined deposition area using the preplanned scan path in the set notwithstanding the rotational error as the substrate is transported relative to the print head.

4. The method of claim 3 , wherein changing the default nozzle firing instructions comprises (a) retrieving the expected droplet volumes from non-transitory storage, (b) determining whether or not deposition of a droplet according to the expected droplet volume of a given nozzle would cause the deposited liquid within the predetermined deposition area to fall outside the predetermined volume tolerance range, and (c) generating the printer control data to include at least one droplet firing instruction for the given nozzle if the deposited liquid including the expected droplet volume would not cause the deposited liquid within the predetermined deposition area to fall outside the predetermined volume tolerance range.

5. The method of claim 3 , wherein changing the default nozzle firing instructions comprises (a) retrieving an expected droplet landing position specific to a given nozzle from non-transitory storage, the expected droplet landing position representing empirical measurement of at least one droplet produced by the given nozzle during a calibration operation, (b) determining whether or not deposition of a droplet according to the expected droplet landing position would cause the deposited liquid within the predetermined deposition area to fall within the predetermined volume tolerance range, and (c) generating the printer control data to include at least one droplet firing instruction for the given nozzle if the deposited liquid including the expected droplet landing position would cause the deposited liquid within the predetermined deposition area to fall within the predetermined volume tolerance range.

6. The method of claim 1 , wherein generating the printer control data comprises (a) retrieving the expected droplet volumes from non-transitory storage, (b) determining whether or not deposition of a droplet according to the expected droplet volume of a given nozzle would cause the deposited liquid within the predetermined deposition area to fall outside the predetermined volume tolerance range, and (c) using the given nozzle, such that the printer control data includes at least one droplet firing instruction for the given nozzle, if the deposited liquid including the expected droplet volume would not cause the deposited liquid to fall outside the predetermined volume tolerance range.

7. The method of claim 1 , wherein the liquid is an organic material and wherein processing comprises exposing the liquid in the predetermined deposition area to ultraviolet light, following printing, to thereby cure the organic material.

8. The method of claim 1 , wherein the detecting misalignment comprises detecting lateral offset of the predetermined deposition area relative to an intended position, in a dimension orthogonal to a direction of transport of the substrate relative to the printer during the scan.

9. The method of claim 8 , wherein generating the printer control data comprises retrieving a set of one or more preplanned scan paths from non-transitory storage, and wherein generating the printer control data comprises changing at least one scan path in the set of one or more preplanned scan paths in dependence on the lateral offset, so as to print into the predetermined deposition area notwithstanding the lateral offset as the substrate is conveyed relative to the printer.

10. The method of claim 1 , wherein:

generating the printer control data comprises retrieving a set of one or more preplanned scan paths from non-transitory storage, as well as predetermined nozzle control data for a given nozzle of the printhead;

the predetermined nozzle control data is such that the given nozzle is to be fired x times in connection with one of the preplanned scan paths in the set, x being greater than or equal to zero;

generating the printer control data comprises adjusting the predetermined nozzle control data to perform at least one of increasing or decreasing x in dependence on the misalignment, to change the number of times that the given nozzle is to be fired in connection with the one of the preplanned scan paths and to generate adjusted data; and

printing comprises printing according to the adjusted data.

11. A method of fabricating a layer on each substrate of a set of substrates, each of the layers to form part of a respective product, the method comprising, for each of the substrates:

receiving the substrate;

disposing the substrate on a flotation table;

using a printer to deposit droplets of liquid from nozzles of a print head within a predetermined deposition area of the substrate; and

processing the liquid once deposited within the predetermined deposition area to dry or cure the liquid to form the layer;

wherein the method further comprises

detecting misalignment of each substrate, individually, the misalignment being relative to an intended orientation of the substrate during a scan of the substrate relative to the print head,

generating for each substrate printer control data to govern use of the printer to deposit the droplets, the printer control data comprising a nozzle firing instruction for at least one of the nozzles of the print head selected in dependence on the detected misalignment of the substrate, the printer control data representing a selection of one or more nozzles including the at least one of the nozzles, based on an expected droplet volume from each of the selected nozzles determined from empirical measurement of at least one droplet produced by each selected nozzle during a calibration operation, to produce an expected aggregate volume of the liquid from the nozzle selection that is within both the predetermined volume tolerance range and the predetermined deposition area of the substrate, notwithstanding the misalignment of the substrate, and

printing onto each substrate according to the corresponding printer control data, notwithstanding the misalignment of the substrate.

12. The method of claim 11 , wherein detecting misalignment comprises detecting rotational error of the predetermined deposition area relative to a direction of transport of the substrate relative to the print head during the scan.

13. The method of claim 12 , wherein each substrate bears an optical fiducial, wherein detecting misalignment comprises imaging the optical fiducial of each substrate using an image detection system, and wherein generating the printer control data for each substrate comprises (a) retrieving from non-transitory storage a predetermined set of one or more preplanned scan paths represented by the printer control data, and default nozzle firing instructions, and (b) changing default nozzle firing instructions for at least two of the nozzles of the print head to be used in connection with a preplanned scan path, so as to print into the predetermined deposition area using the preplanned scan path in the set notwithstanding the rotational error of the substrate as the substrate is transported relative to the print head.

14. The method of claim 13 , wherein changing the default nozzle firing instructions comprises (a) retrieving the expected droplet volumes from non-transitory storage (b) determining whether or not deposition of a droplet according to the expected droplet volume of a given nozzle would cause the deposited liquid within the predetermined deposition area to fall outside the predetermined volume tolerance range, given the misalignment of the substrate, if any, and (c) generating the printer control data to include at least one droplet firing instruction for the given nozzle if the deposited liquid including the expected droplet volume would not cause the deposited liquid within the predetermined deposition area to fall outside the predetermined volume tolerance range.

15. The method of claim 13 , wherein changing the default nozzle firing instructions comprises (a) retrieving an expected droplet landing position specific to a given nozzle from non-transitory storage, the expected droplet landing position representing empirical measurement of at least one droplet produced by the given nozzle during a calibration operation, (b) determining whether or not deposition of a droplet according to the expected droplet landing position would cause the deposited liquid within the predetermined deposition area to fall within the predetermined volume tolerance range, given the misalignment of the substrate, if any, and (c) generating the printer control data to include at least one droplet firing instruction for the given nozzle if the deposited liquid including the expected droplet landing position would cause the deposited liquid within the predetermined deposition area to fall within the predetermined volume tolerance range.

16. The method of claim 11 , wherein generating the printer control data comprises (a) retrieving the expected droplet volumes from non-transitory storage, (b) determining whether or not deposition of a droplet according to the expected droplet volume of a given nozzle would cause the deposited liquid within the predetermined deposition area to fall outside the predetermined volume tolerance range, given the misalignment of the substrate, if any, and (c) using the given nozzle, such that the printer control data includes at least one droplet firing instruction for the given nozzle, if the deposited liquid including the expected droplet volume would not cause the deposited liquid to fall outside the predetermined volume tolerance range.

17. The method of claim 11 , wherein the liquid is an organic material and wherein processing comprises exposing the liquid in the predetermined deposition area to ultraviolet light, following printing, to thereby cure the organic material.

18. The method of claim 11 , wherein the detecting misalignment comprises detecting lateral offset of the predetermined deposition area for each substrate relative to an intended position, in a dimension orthogonal to a direction of transport of the substrate relative to the printer during the scan.

19. The method of claim 18 , wherein generating the printer control data comprises retrieving a set of one or more preplanned scan paths from non-transitory storage, and wherein generating the printer control data comprises changing at least one scan path in the set of one or more preplanned scan paths in dependence on the lateral offset detected for the substrate, if any, so as to print into the predetermined deposition area notwithstanding the lateral offset as the substrate is conveyed relative to the printer.

20. The method of claim 11 , wherein:

generating the printer control data comprises retrieving a set of one or more preplanned scan paths from non-transitory storage, as well as predetermined nozzle control data for a given nozzle of the printhead;

the predetermined nozzle control data is such that the given nozzle is to be fired x times in connection with one of the preplanned scan paths in the set, x being greater than or equal to zero;

generating the printer control data comprises adjusting the predetermined nozzle control data to perform at least one of increasing or decreasing x in dependence on the misalignment of the substrate, if any, to change the number of times that the given nozzle is to be fired in connection with the one of the preplanned scan paths and to generate adjusted data; and

printing comprises printing onto the substrate according to the adjusted data.

21. A method of fabricating a layer on a substrate, the layer to form part of a product, the method comprising:

receiving the substrate;

disposing the substrate on a flotation table;

using a printer to deposit droplets of liquid from nozzles of a print head within a predetermined deposition area of the substrate; and

processing the liquid once deposited within the predetermined deposition area to dry or cure the liquid to form the layer;

wherein the method further comprises

optically imaging one or more fiducials on a substrate and, using a processor-based image processing system, detecting misalignment of the substrate, the misalignment relative to an intended orientation of the substrate during a scan of the substrate relative to the print head,

generating, using at least one processor, printer control data to govern use of the printer to deposit the droplets, the printer control data comprising a nozzle firing instruction for at least one of the nozzles of the print head selected in dependence on the detected misalignment, the printer control data representing a selection of one or more nozzles including the at least one of the nozzles, based on an expected droplet volume from each of the selected nozzles determined from empirical measurement of at least one droplet produced by each selected nozzle during a calibration operation, to produce an expected aggregate volume of the liquid from the nozzle selection that is within both the predetermined volume tolerance range and the predetermined deposition area, notwithstanding the misalignment, and

printing according to the printer control data, notwithstanding the misalignment; and wherein the product is device having an array of electro-optical elements, wherein the predetermined deposition area comprises a well associated with an individual electro-optical element of the electro-optical device, and wherein generating and printing is performed for each of the electro-optical elements in the array.

Assignments (6)
SECURITY INTEREST Recorded Apr 19, 2022
From: KATEEVA CAYMAN HOLDING, INC.
To: HB SOLUTION CO., LTD.
Reel/Frame 059727/0111 →
SECURITY INTEREST Recorded Mar 17, 2022
From: KATEEVA, INC.; KATEEVA CAYMAN HOLDING, INC.
To: SINO XIN JI LIMITED
Reel/Frame 059382/0053 →
SECURITY AGREEMENT Recorded Jan 23, 2020
From: KATEEVA, INC.
To: SINO XIN JI LIMITED
Reel/Frame 051682/0212 →
RELEASE OF SECURITY INTEREST Recorded Jan 22, 2020
From: EAST WEST BANK, A CALIFORNIA BANKING CORPORATION
To: KATEEVA, INC.
Reel/Frame 051664/0802 →
SECURITY INTEREST Recorded Apr 4, 2019
From: KATEEVA, INC.
To: EAST WEST BANK
Reel/Frame 048806/0639 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 4, 2018
From: BAKER, MICHAEL; HARJEE, NAHID; BACON, DOUGLAS
To: KATEEVA, INC.
Reel/Frame 045101/0090 →
Priority Claims (1)
TW 102148330 · Dec 26, 2013 · national
Continuity (25)
Continuation 14788609 · Jun 30, 2015
Continuation In Part 14680960 · Apr 7, 2015
Continuation 14162525 · Jan 23, 2014
Continuation PCTUS2013077720 · Dec 24, 2013
Continuation In Part 14340403 · Jul 24, 2014
Continuation In Part PCTUS2014035193 · Apr 23, 2014
Continuation In Part 14162525 · Jan 23, 2014
Continuation In Part 14627186 · Feb 20, 2015
Continuation 14458005 · Aug 12, 2014
Provisional Application 62059121 · Oct 2, 2014
Provisional Application 62021584 · Jul 7, 2014
Provisional Application 61746545 · Dec 27, 2012
Provisional Application 61822855 · May 13, 2013
Provisional Application 61842351 · Jul 2, 2013
Provisional Application 61857298 · Jul 23, 2013
Provisional Application 61898769 · Nov 1, 2013
Provisional Application 61920715 · Dec 24, 2013
Provisional Application 61950820 · Mar 10, 2014
Provisional Application 61816696 · Apr 26, 2013
Provisional Application 61866031 · Aug 14, 2013
Provisional Application 61915149 · Dec 12, 2013
Provisional Application 61977939 · Apr 10, 2014
Provisional Application 62005044 · May 30, 2014
Provisional Application 62019076 · Jun 30, 2014
Related Publication 20180008995A1 · Jan 11, 2018
Cited By (1)
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