IP Library Granted Patent US 10,401,616
Granted Patent B2
US 10,401,616 · App. 15/617,032 · Granted Sep 3, 2019

Amplitude control during start-up of resonating mirror

Inventor: Elik Haran (Kfar Saba, IL)
Assignee: STMicroelectronics Ltd.
G02B26/0833G02B26/105
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Quick Facts
Patent No.
US 10,401,616
App. No.
15/617,032
Granted
Sep 3, 2019
Kind
B2
Abstract

Disclosed herein is a control circuit for a movable mirror. The control circuit includes driving circuitry configured to drive the movable mirror with a drive signal to effectuate oscillating of the movable mirror, opening angle determination circuitry configured to determine an opening angle of the movable mirror, and amplitude control circuitry. The amplitude control circuitry is configured to a) first cause the driving circuitry to generate the drive signal as having an upper threshold drive amplitude, and b) then later cause the driving circuitry to generate the drive signal as having a nominal drive amplitude, as a function of the opening angle of the movable mirror being equal to a desired opening angle.

Claims (44)

1. A control circuit for a movable mirror, the control circuit comprising:

driving circuitry configured to drive the movable mirror with a drive signal to effectuate oscillating of the movable mirror;

opening angle determination circuitry configured to determine an opening angle of the movable mirror; and

amplitude control circuitry configured to:

a) first cause the driving circuitry to generate the drive signal as having an upper threshold drive amplitude to transition the movable mirror from a rest state to oscillation at a desired opening angle; and

b) once the movable mirror is oscillating at the desired opening angle, then cause the driving circuitry to generate the drive signal as having a nominal drive amplitude sufficient to maintain the oscillation of the movable mirror at the desired opening angle, the nominal drive amplitude being less than the upper threshold drive amplitude.

2. The control circuit of claim 1 , wherein the amplitude control circuitry is further configured to:

between a) and b), cause the driving circuitry to generate the drive signal as having a first drive amplitude less than the upper threshold drive amplitude but greater than a nominal drive amplitude, as a function of the opening angle of the movable mirror being not equal to a desired opening angle of the movable mirror.

3. The control circuit of claim 2 , wherein the amplitude control circuitry is further configured to:

iteratively cause the driving circuitry to generate the drive signal as having a drive amplitude that is less than the drive amplitude of a previous iteration, as a function of the opening angle of the movable mirror being not equal to the desired opening angle of the movable mirror.

4. A control circuit for a movable mirror, the control circuit comprising:

driving circuitry configured to drive the movable mirror with a drive signal to effectuate oscillating of the movable mirror; and

amplitude control circuitry configured to:

cause the driving circuitry to generate the drive signal as having an amplitude that decreases from an upper threshold amplitude that transitions the movable mirror from a rest state to oscillation at a desired opening angle to a nominal drive amplitude over time, the nominal drive amplitude being less than the upper threshold amplitude.

5. The control circuit of claim 4 , wherein the amplitude control circuitry causing the driving circuitry to generate the drive signal as having an amplitude that decreases from an upper threshold amplitude to a nominal drive amplitude over time comprises:

causing the driving circuitry to generate the drive signal as having an upper threshold drive amplitude for a first period of time;

after the first period of time, iteratively causing the driving circuitry to generate the drive signal as having a drive amplitude that is less than the drive amplitude of a previous iteration, until an iteration is reached where the drive amplitude is equal to a nominal drive amplitude.

6. The control circuit of claim 4 , wherein the amplitude control circuitry causing the driving circuitry to generate the drive signal as having an amplitude that decreases from an upper threshold amplitude to a nominal drive amplitude over time comprises:

causing the driving circuitry to generate the drive signal as having an upper threshold drive amplitude;

monitoring an opening angle of the movable mirror; and

causing the driving circuitry to generate the drive signal as having a nominal drive amplitude, as a function of the opening angle of the movable mirror being equal to a desired opening angle.

7. The control circuit of claim 6 , wherein the amplitude control circuitry is further configured to:

cause the driving circuitry to generate the drive signal as having a first drive amplitude less than the upper threshold drive amplitude but greater than a nominal drive amplitude, as a function of the opening angle of the movable mirror being greater than a threshold value but not equal to a desired opening angle of the movable mirror.

8. The control circuit of claim 6 , wherein the amplitude control circuitry is further configured to:

iteratively cause the driving circuitry to generate the drive signal as having a drive amplitude that is less than the drive amplitude of a previous iteration, as a function of the opening angle of the movable mirror being greater than a threshold value but not equal to the desired opening angle of the movable mirror.

9. A picoprojector, comprising:

a movable mirror;

driving circuitry configured to drive the movable mirror with a drive signal to effectuate oscillating of the movable mirror;

an opening angle monitor associated with the movable mirror and configured to monitor an opening angle of the movable mirror;

a laser configured to impinge on, and be reflected by, the movable mirror; and

amplitude control circuitry configured to:

cause the driving circuitry to generate the drive signal as having an upper threshold drive amplitude to transition the movable mirror from a rest state to oscillation at a desired opening angle; and

once the movable mirror is oscillating at the desired opening angle, cause the driving circuitry to generate the drive signal as having a nominal drive amplitude sufficient to maintain the oscillation of the movable mirror at the desired opening angle, the nominal drive amplitude being less than the upper threshold drive amplitude.

10. The picoprojector of claim 9 , wherein the amplitude control circuitry is further configured to:

cause the driving circuitry to generate the drive signal as having a first drive amplitude less than the upper threshold drive amplitude but greater than a nominal drive amplitude, as a function of the opening angle of the movable mirror being greater than a threshold value but not equal to a desired opening angle of the movable mirror.

11. The picoprojector of claim 10 , wherein the amplitude control circuitry is further configured to:

iteratively cause the driving circuitry to generate the drive signal as having a drive amplitude that is less than the drive amplitude of a previous iteration, as a function of the opening angle of the movable mirror being not equal to the desired opening angle of the movable mirror.

12. A method of driving a movable mirror from rest to a desired opening angle, the method comprising:

monitoring an opening angle of the movable mirror;

initially driving the movable mirror with a drive signal having an upper threshold drive amplitude to transition the movable mirror from rest to oscillation at the desired opening angle;

if the opening angle of the movable mirror is equal to the desired opening angle, then drive the movable mirror with a drive signal having a nominal drive amplitude sufficient to maintain the oscillation of the movable mirror at the desired opening angle, the nominal drive amplitude being less than the upper threshold drive amplitude; and

if the opening angle of the movable mirror is less than the desired opening angle, then over time decrease the drive amplitude of the drive signal until the opening angle of the movable mirror is equal to the desired opening angle.

13. The method of claim 12 , wherein decreasing the drive amplitude of the drive signal over time comprises changing the drive amplitude of the drive signal to an intermediate amplitude that is greater than the nominal drive amplitude but less than the upper threshold drive amplitude.

14. The method of claim 12 , wherein decreasing the drive amplitude of the drive signal over time comprises iteratively generating the drive signal as having a drive amplitude that is less than the drive amplitude of a previous iteration until the drive amplitude of a present iteration is equal to the nominal drive amplitude.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 16, 2022
From: STMICROELECTRONICS LTD
To: STMICROELECTRONICS INTERNATIONAL N.V.
Reel/Frame 061796/0069 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 8, 2017
From: HARAN, ELIK
To: STMICROELECTRONICS LTD
Reel/Frame 042644/0531 →
Continuity (1)
Related Publication 20180356627A1 · Dec 13, 2018