Method for manufacturing a semiconductor device
To effectively prevent short circuit between capacitors adjacent to each other. A semiconductor device has a substrate, an interlayer insulating film, a plurality of capacitors, and an isolation insulating film. The interlayer insulating film is located over the substrate. The capacitors are located in a plurality of recesses, respectively. The recesses each have an opening in the surface of the interlayer insulating film. The isolation insulating film lies in the interlayer insulating film. The isolation insulating films are located between recesses adjacent to each other in plan view. Further, the isolation insulating film is made of a material different from that of the interlayer insulating film.
1. A method for manufacturing a semiconductor device comprising:
forming a first interlayer insulating film over a semiconductor substrate;
forming a conductive film on the first interlayer insulating film;
forming a first isolation insulating film on the conductive film;
selectively removing the conductive film and the first isolation insulating film to expose a part of the first interlayer insulating film and to form a first wiring covered with the first isolation insulating film and a second wiring covered with the first isolation insulating film;
forming a second interlayer insulating film on the first interlayer insulating film and the first isolation insulating film;
etching the first and the second interlayer insulating films by using the first isolation insulating film as a mask to form a trench between the first and the second wirings; and
forming a lower electrode, a capacitor insulating film and an upper electrode in the trench to form a capacitor.
2. The method of manufacturing the semiconductor device according to claim 1 , wherein a material of the first isolation insulating film is different from that of the first and the second interlayer insulating films.
3. The method of manufacturing the semiconductor device according to claim 1 , wherein an etch selectivity of the first and the second interlayer insulating films is large relative to the first isolation insulating film.
4. The method of manufacturing the semiconductor device according to claim 1 , wherein the first and the second wirings comprises a first and a second bit line, respectively.