Depositing a passivation layer on a graphene sheet
Embodiments of the disclosed technology include depositing a passivation layer onto a surface of a wafer that may include a graphene layer. The passivation layer may protect and isolate the graphene layer from electrical and chemical conditions that may damage the graphene layer. As such, the passivation layer may further protect the graphene sensor from being damaged and impaired for its intended use. Additionally, the passivation layer may be patterned to expose select areas of the graphene layer below the passivation layer, thus creating graphene wells and exposing the graphene layer to the appropriate chemicals and solutions.
1. A method for producing a graphene well comprising:
placing a graphene sheet on a substrate;
depositing a gold layer on top of the graphene sheet by dipping the graphene sheet in a gold plating solution;
depositing a passivation layer on top of the gold layer; and
depositing a photoresist layer on top of the passivation layer;
wherein the depositing the passivation layer comprises a deposition process utilizing temperatures ranging from 100° C. to 200° C.
2. The method of claim 1 , further comprising depositing a second metal layer between the gold layer and the passivation layer.
3. The method of claim 2 , wherein the second metal layer comprises titanium, aluminum, chrome, nickel, or titanium nitride.
4. The method of claim 1 , wherein the passivation layer comprises a dielectric layer.
5. The method of claim 4 , wherein the dielectric layer comprises silicon dioxide, silicon nitride, silicon oxide, amorphous silicon, or polysilicon.
6. The method of claim 1 , further comprising etching the photoresist layer to expose a surface of the passivation layer.
7. The method of claim 6 , wherein the etching of the photoresist layer comprises applying an acetone rinse and applying an isopropanol alcohol rinse.
8. The method of claim 1 , further comprising removing the passivation layer by a dry etching technique.
9. The method of claim 1 , wherein depositing the passivation layer comprises applying a plasma enhanced chemical vapor deposition process.
10. A method for producing a graphene well comprising:
placing a graphene sheet on a substrate;
depositing a first metal layer comprising gold on top of the graphene sheet by dipping the graphene sheet in a gold plating solution;
depositing a passivation layer on top of the first metal layer;
depositing a photoresist layer on top of the passivation layer; and
etching a pattern on the photoresist layer to expose a surface of the passivation layer;
wherein the depositing the passivation layer comprises a deposition process utilizing temperatures ranging from 100° C. to 200° C.
11. The method of claim 10 , further comprising depositing a second metal layer between the first metal layer and the passivation layer.
12. The method of claim 11 , wherein the second metal layer comprises titanium, aluminum, chrome, nickel, or titanium nitride.
13. The method of claim 1 , wherein the passivation layer comprises a dielectric layer.