Method of manufacturing display device
View Patent ↗A manufacturing method of a display device is provided including forming a first insulation film above a region including a display region of a substrate, adsorbing organic molecules to approximately the entire first surface on the opposite side to the substrate of the first insulation film, removing the organic molecules adsorbed to a first region defined as an inner side region not reaching an end part of the first insulation film including the display region on the first surface of the first insulation film, forming a second insulation film in the first region removed of the organic molecules on the first insulation film, removing the organic molecules adsorbed in regions apart from the first region of the first insulation film, and forming a third insulation film contacting the first insulation film at an outer side of the second insulation film above the first insulation film and the second insulation film.
1. A manufacturing method of a display device, the method comprising:
forming a first insulation film above a region including a display region of a substrate having the display region arranged with a plurality of display elements;
adsorbing organic molecules to approximately the entire first surface on the opposite side to the substrate of the first insulation film;
removing the organic molecules adsorbed to a first region defined as an inner side region not reaching an end part of the first insulation film including the display region on the first surface of the first insulation film;
forming a second insulation film in the first region removed of the organic molecules on the first insulation film;
removing the organic molecules adsorbed in regions apart from the first region of the first insulation film; and
forming a third insulation film contacting the first insulation film at an outer side of the second insulation film above the first insulation film and the second insulation film.
2. The manufacturing method of a display device according to claim 1 , wherein the organic molecules are removed by arranging a mask having an opening part for exposing the first region above the first insulation film and performing a plasma treatment.
3. The manufacturing method of a display device according to claim 2 , wherein the plasma treatment is a glow discharge plasma treatment of a gas including oxygen.
4. The manufacturing method of a display device according to claim 1 , wherein the organic molecules are molecules of one or a plurality of organic materials selected from phthalic ester, low molecular siloxane, phosphoric acid ester or dibutylhydroxytoluene.
5. The manufacturing method of a display device according to claim 4 , wherein the organic molecules increase liquid repellency of a first surface of the first insulation film.
6. A manufacturing method of a display device, the method comprising:
forming a first insulation film above a region including a display region of a substrate having the display region arranged with a plurality of display elements;
adsorbing organic molecules to the first insulation film masking a first region defined as an inner side region not reaching an end part of the first insulation film including the display region on a first surface on the opposite side to the substrate of the first insulation film;
forming a second insulation film in the first region unadsorbed with the organic molecules on the first insulation film;
removing the organic molecules adsorbed in regions apart from the first region of the first insulation film; and
forming a third insulation film contacting the first insulation film at an outer side of the second insulation film above the first insulation film and the second insulation film.
7. The manufacturing method of a display device according to claim 6 , wherein the organic molecules are molecules of one or a plurality of organic materials selected from phthalic ester, low molecular siloxane, phosphoric acid ester or dibutylhydroxytoluene.
8. The manufacturing method of a display device according to claim 7 , wherein the organic molecules increase liquid repellency of a first surface of the first insulation film.
9. A manufacturing method of a display device, the method comprising:
forming a first insulation film above a region including a display region of a substrate having the display region arranged with a plurality of display elements;
forming an adhesion film on a first insulation film masking regions other than a first region defined as an inner side region not reaching an end part of the first insulation film including the display region on a first surface on the opposite side to the substrate of the first insulation film;
forming a second insulation film in the first region formed with the adhesion film on the first insulation film; and
forming a third insulation film contacting the first insulation film at an outer side of the second insulation film above the first insulation film and the second insulation film.
10. The manufacturing method of a display device according to claim 9 , wherein the adhesion film is formed in the first region and not formed in a region further to the outside than the first region.
11. The manufacturing method of a display device according to claim 10 , wherein the adhesion film is silicon oxide or amorphous silicon.
12. The manufacturing method of a display device according to claim 11 , wherein the adhesion film increases adhesion of the second insulation film.
13. The manufacturing method of a display device according to claim 1 , wherein an end part of the second insulation film is formed further to the outside than an end part of the display region, and an end part of the first insulation film and an end part of the third insulation film are formed further to the outside than an end part of the second insulation film.
14. The manufacturing method of a display device according to claim 13 , wherein the substrate has a drive circuit region including a drive circuit, and the first region is formed on the outer side of the drive circuit region.
15. The manufacturing method of a display device according to claim 14 , wherein an end part of the second insulation film is formed between and end part of the display region and an end part of the drive circuit region.
16. The manufacturing method of a display device according to claim 15 , wherein the second insulation film is formed by an inkjet method.
17. The manufacturing method of a display device according to claim 16 , wherein the second insulation film is formed using an organic insulation material.