Time delay filters

1. A time delay filter comprising:

a substrate comprising a conductive ground region;

a first LC resonator coupled to the substrate and comprising:

a first coupling point,

a first capacitive element electrically coupled between the first coupling point and the ground region, and

a first inductive element electrically coupled between the first coupling point and the ground region;

a second LC resonator coupled to the substrate and comprising:

a second coupling point,

a second capacitive element electrically coupled between the second coupling point and the ground region, and

a second inductive element electrically coupled between the second coupling point and the ground region;

a third LC resonator coupled to the substrate and comprising:

a third coupling point,

a third capacitive element electrically coupled between the third coupling point and the ground region, and

a third inductive element electrically coupled between the third coupling point and the ground region;

a fourth LC resonator coupled to the substrate and comprising:

a fourth coupling point,

a fourth capacitive element electrically coupled between the fourth coupling point and the ground region, and

a fourth inductive element electrically coupled between the fourth coupling point and the ground region;

a first capacitor that electrically couples the first coupling point to the second coupling point;

a second capacitor that electrically couples the second coupling point to the third coupling point; and

a third capacitor that electrically couples the third coupling point to the fourth coupling point;

wherein the filter group delays a signal output at the fourth coupling point relative to a signal input at the first coupling point; wherein the substrate comprises a first surface, a second surface substantially parallel to the first surface, and a volume between the first and second surfaces; wherein the first, second, third, and fourth capacitive elements are buried capacitors within the substrate volume; wherein the first, second, and third capacitors are surface capacitors on the first surface of the substrate; wherein first and second sides of the first capacitive element are separated by a dielectric layer of the substrate, wherein the dielectric layer comprises hafnium oxide.

2. The time delay filter of claim 1 , wherein the first, second, third, and fourth LC resonators are arranged on the substrate in a horseshoe pattern or in a meander pattern.

3. The time delay filter of claim 2 , wherein the first inductive element is adjacent the fourth inductive element and the first and fourth inductive elements are magnetically coupled during operation of the time delay filter; wherein the first and fourth LC resonators are not directly capacitively coupled.

4. The time delay filter of claim 3 , further comprising:

a fifth LC resonator coupled to the substrate and comprising:

a fifth coupling point,

a fifth capacitive element electrically coupled between the fifth coupling point and the ground region, and

a fifth inductive element electrically coupled between the fifth coupling point and the ground region;

a sixth LC resonator coupled to the substrate and comprising:

a sixth coupling point,

a sixth capacitive element electrically coupled between the sixth coupling point and the ground region, and

a sixth inductive element electrically coupled between the sixth coupling point and the ground region; and

a fourth capacitor that electrically couples the fourth coupling point to the fifth coupling point; and

a fifth capacitor that electrically couples the fifth coupling point to the sixth coupling point.

5. The time delay filter of claim 4 , wherein the first, second, third, fourth, fifth, and sixth LC resonators are arranged on the substrate in a meander pattern.

6. The time delay filter of claim 5 , wherein the third inductive element is adjacent the sixth inductive element and the third and sixth inductive elements are magnetically coupled during operation of the time delay filter; wherein the third and sixth LC resonators are not directly capacitively coupled.

7. The time delay filter of claim 1 , wherein the first, second, third, and fourth LC resonators are arranged in a zig-zag pattern.

8. The time delay filter of claim 7 , wherein the first inductive element is adjacent the third inductive element and the first and third inductive elements are magnetically coupled during operation of the time delay filter; wherein the first and third LC resonators are not directly capacitively coupled.

9. The time delay filter of claim 8 , wherein the second inductive element is adjacent the fourth inductive element and the second and fourth inductive elements are magnetically coupled during operation of the time delay filter; wherein the second and fourth LC resonators are not directly capacitively coupled.

10. The time delay filter of claim 1 , wherein the first inductive element comprises:

a first conductive region coupled to the first surface of the substrate;

a second conductive region coupled to the second surface of the substrate;

a first via that is electrically coupled to and extends between the first and second conductive region;

a second via that is electrically coupled to and extends between the first conductive region and a first portion of the first capacitive element; and

a third via that is electrically coupled to and extends between the second conductive region and a second portion of the first capacitive element;

wherein the first conductive region, the first via, the second conductive region, the second via, the first capacitive element, and the third via form a loop.

11. A time delay filter comprising:

a substrate comprising a conductive ground region;

a first LC resonator coupled to the substrate and comprising:

a first coupling point,

a first capacitive element electrically coupled between the first coupling point and the ground region, and

a first inductive element electrically coupled between the first coupling point and the ground region;

a second LC resonator coupled to the substrate and comprising:

a second coupling point,

a second capacitive element electrically coupled between the second coupling point and the ground region, and

a second inductive element electrically coupled between the second coupling point and the ground region;

a third LC resonator coupled to the substrate and comprising:

a third coupling point,

a third capacitive element electrically coupled between the third coupling point and the ground region, and

a third inductive element electrically coupled between the third coupling point and the ground region;

a fourth LC resonator coupled to the substrate and comprising:

a fourth coupling point,

a fourth capacitive element electrically coupled between the fourth coupling point and the ground region, and

a fourth inductive element electrically coupled between the fourth coupling point and the ground region;

a fifth LC resonator coupled to the substrate and comprising:

a fifth coupling point,

a fifth capacitive element electrically coupled between the fifth coupling point and the ground region, and

a fifth inductive element electrically coupled between the fifth coupling point and the ground region;

a sixth LC resonator coupled to the substrate and comprising:

a sixth coupling point,

a sixth capacitive element electrically coupled between the sixth coupling point and the ground region, and

a sixth inductive element electrically coupled between the sixth coupling point and the ground region

a first capacitor that electrically couples the first coupling point to the second coupling point;

a second capacitor that electrically couples the second coupling point to the third coupling point; and

a third capacitor that electrically couples the third coupling point to the fourth coupling point;

a fourth capacitor that electrically couples the fourth coupling point to the fifth coupling point; and

a fifth capacitor that electrically couples the fifth coupling point to the sixth coupling point;

wherein the filter group delays a signal output at the sixth coupling point relative to a signal input at the first coupling point; wherein the first, second, third, fourth, fifth, and sixth LC resonators are arranged on the substrate in a horseshoe pattern; wherein the substrate comprises a first surface, a second surface substantially parallel to the first surface, and a volume between the first and second surfaces; wherein the first, second, third, fourth, fifth, and sixth capacitive elements are buried capacitors within the substrate volume; wherein the first, second, third, fourth, and fifth capacitors are surface capacitors on the first surface of the substrate; wherein first and second sides of the first capacitive element are separated by a dielectric layer of the substrate, wherein the dielectric layer comprises hafnium oxide.

12. The time delay filter of claim 11 , wherein the first inductive element is adjacent the sixth inductive element and the first and sixth inductive elements are magnetically coupled during operation of the time delay filter; wherein the first and sixth LC resonators are not directly capacitively coupled.

13. The time delay filter of claim 12 , wherein the second inductive element is adjacent the fifth inductive element and the second and fifth inductive elements are magnetically coupled during operation of the time delay filter; wherein the second and fifth LC resonators are not directly capacitively coupled.

14. The time delay filter of claim 11 , wherein the first inductive element comprises:

a first conductive region coupled to the first surface of the substrate;

a second conductive region coupled to the second surface of the substrate;

a first via that is electrically coupled to and extends between the first and second conductive region;

a second via that is electrically coupled to and extends between the first conductive region and a first portion of the first capacitive element; and

a third via that is electrically coupled to and extends between the second conductive region and a second portion of the first capacitive element;

wherein the first conductive region, the first via, the second conductive region, the second via, the first capacitive element, and the third via form a loop.