Integrated gas sensor device, in particular for detecting carbon monoxide (CO)
It is described an integrated gas sensor device comprising a silicon substrate and an oxide layer on the silicon substrate, as well as a working electrode, a counter electrode and a reference electrode, on the oxide layer, the working electrode and the counter electrode having respective active area exposed to an environmental air through at least a plurality of first openings and a plurality of second openings in the oxide layer in correspondence of the working electrode and of the counter electrode, further comprising an electrolyte layer portion and a hydrogel layer portion on the electrolyte layer portion, the electrolyte and hydrogel layer portions having a same size, suitable to cover at least the working, counter and reference electrodes, the hydrogel layer portion acting as a “quasi solid state” water reservoir.
1. A method, comprising:
forming a first insulating layer on a first side of a substrate, the substrate having a second side opposite the first side;
forming a patterned layer on the first insulating layer, the patterned layer having a first electrode, a second electrode, and a third electrode, the forming the patterned layer including forming first through holes in at least one of the first electrode and the second electrode; and
forming a electrolytic hydrogel layer on the patterned layer, first portions of the electrolytic hydrogel layer being between the first, second, and third electrodes, respectively, and second portions of the electrolytic hydrogel layer being in at least one of the first through holes.
2. The method of claim 1 wherein the electrolytic hydrogel layer includes an electrolyte layer and a hydrogel layer on the electrolyte layer.
3. The method of claim 1 , further comprising:
exposing the electrolytic hydrogel layer to the external environment by etching a through hole in the second side of the substrate.
4. The method of claim 3 wherein the exposing the electrolytic hydrogel layer includes etching the through hole through the first insulating layer to the first portions of the electrolytic hydrogel layer.
5. The method of claim 1 wherein the forming the patterned layer includes forming a first metal layer and a second metal layer on the first metal layer, the first, second and third electrodes each etched from the first and second metal layers, the first electrode being a working electrode, the second electrode being a counter electrode, and the third electrode being a reference electrode.
6. The method of claim 1 , further comprising:
forming a capping layer, the capping layer in contact with the electrolytic hydrogel layer, and the first insulating layer.
7. The method of claim 5 , wherein forming the patterned layer includes the first through holes having a hexagonal shape.
8. The method of claim 1 , further comprising:
etching the first layer to form second through holes in the first insulating layer, the second through holes abutting the first through holes.
9. The method of claim 8 , further comprising:
exposing active areas of the working and counter electrodes to an external environment.
10. The method of claim 9 , wherein the exposing the active areas of the working and counter electrodes to the external environment includes forming a through hole completely through the substrate between the first and second sides.
11. The method of claim 9 , wherein the exposing the active areas of the working and counter electrodes to the external environment includes forming a plurality of third through holes extending completely through the substrate between the first and second sides, the third through holes being aligned with the second through holes, respectively.
12. The method of claim 8 , wherein the etching the insulating layer includes using a lithography mask to form the second through holes in the first insulating layer, the second through holes being smaller than the first through holes.
13. The method of claim 8 , wherein the forming the patterned layer includes forming a first metal layer and a second metal layer on the first metal layer, and the etching the insulating layer includes forming a mask to define the second through holes in the first insulating layer and using the first and second metal layers as an etch stop.
14. The method of claim 1 , further comprising:
etching the electrolytic hydrogel layer to expose a first portion and a second portion of the first insulating layer, the patterned layer being positioned on a third portion of the first insulating layer between the first portion and the second portion.
15. The method of claim 13 , further comprising:
forming a capping layer covering the electrolytic hydrogel layer and contacting the first and second portions of the first insulating layer.
16. A method, comprising:
forming a first insulating layer on a first side of a substrate, the substrate having a second side opposite the first side, the first insulating layer having a plurality of first through holes;
forming a patterned layer on the first insulating layer, the patterned layer having a first electrode, a second electrode, and a third electrode, the first electrode and the second electrode including a plurality of second through holes, each second through hole of the plurality of second through holes aligned with a respective one of the plurality of first through holes;
forming a electrolytic hydrogel layer on the patterned layer, portions of the electrolytic hydrogel layer between each of the first, second, and third electrodes, respectively; and
exposing active areas of the first and second electrodes to an external environment.
17. The method of claim 16 , wherein the electrolytic hydrogel layer includes an electrolyte layer and a hydrogel layer on the electrolyte layer.
18. The method of claim 16 , wherein exposing active areas of the first and second electrodes to the external environment includes etching a through hole completely through the substrate between the first and second sides.
19. The method of claim 16 , wherein forming the electrolytic hydrogel layer further includes forming portions of the electrolytic hydrogel layer in at least one of the plurality of second through holes.
20. The method of claim 16 , wherein the exposing the active areas of the first and second electrodes to the external environment includes forming a plurality of third through holes extending completely through the substrate between the first and second sides, the third through holes being aligned with the second through holes, respectively.