Electronic apparatus and method for manufacturing the same
According to one embodiment, an electronic apparatus includes a first substrate, a second substrate, and a connecting material. The second substrate includes a second basement and a second conductive layer. The second basement has a third surface opposed to the first conductive layer and a fourth surface and is spaced apart from the first conductive layer. The second substrate has a first hole penetrating the second basement. The first substrate has a second hole. A third opening of the second hole is smaller than a first opening of the first hole. A connecting material connects the first conductive layer and the second conductive layer via the first hole.
1. An electronic apparatus, comprising:
a first substrate including a first glass substrate and a first conductive layer;
a second substrate including a second glass substrate and a second conductive layer;
a seal configured to bond the first substrate to the second substrate; and
a connecting material electrically connecting the first conductive layer and the second conductive layer,
wherein the first glass substrate includes a first surface and a second surface opposite to the first surface,
the first conductive layer is located over the first surface,
the second glass substrate includes a third surface, a fourth surface opposite to the third surface, and a first hole penetrating the second glass substrate,
the third surface is opposed to the first conductive layer and spaced apart from the first conductive layer,
the second conductive layer is located on the fourth surface,
the first hole includes a first opening formed on the fourth surface and a second opening formed on the third surface,
the connecting material contacts the first conductive layer and the second conductive layer via the first hole,
the first glass substrate further includes a second hole that penetrates the first glass substrate and connects to the first hole,
the second hole includes a third opening that is smaller than the first opening and is opposed to the second opening and a fourth opening that is formed on the second surface,
the seal includes a fourth hole through which the first hole and the second hole communicate with each other, and
a diameter of the fourth hole is larger than a diameter of the second opening and a diameter of the third opening.
2. The electronic apparatus according to claim 1 , wherein a diameter of the fourth opening is larger than the diameter of the third opening.
3. The electronic apparatus according to claim 1 , wherein
the diameter of the second opening is smaller than a diameter of the first opening,
a diameter of the fourth opening is smaller than a diameter of the third opening, and
a gradient formed by a central axis of the second hole and an inner surface of the second hole is smaller than formed by a central axis of the first hole and an inner surface of the first hole.
4. The electronic apparatus according to claim 1 , wherein
the first glass substrate includes a concavity connecting to the second hole, and
the third opening is opened to a bottom of the concavity.
5. The electronic apparatus according to claim 4 , wherein
the first conductive layer includes the first hole and a third hole opposed to the concavity, and
the second hole connects to the first hole via the third hole and the concavity.
6. The electronic apparatus according to claim 1 , wherein a diameter of the third opening is ⅕ or less of a diameter of the first opening.
7. The electronic apparatus according to claim 1 , wherein the diameter of the third opening is 5 μm or more and 30 μm or less.
8. The electronic apparatus according to claim 1 , wherein a central axis of the second hole is inclined with respect to a direction perpendicular to the first surface, and
the central axis of the second hole is inclined with respect to a central axis of the first hole.
9. The electronic apparatus according to claim 1 , wherein the second hole has a bent portion, and
a central axis of the second hole is bent at the bent portion.
10. The electronic apparatus according to claim 1 , wherein the connecting material is filled in a part of the second hole.
11. A method for manufacturing an electronic apparatus, comprising:
preparing a first substrate including a first glass substrate and a first conductive layer and a second substrate including a second glass substrate and a second conductive layer, the second glass substrate being opposed to the first conductive layer and spaced apart from the first conductive layer, the first substrate and the second substrate being bonded to each other by a seal;
forming a first hole penetrating the second glass substrate and a fourth hole penetrating the seal,
forming a second hole penetrating the first glass substrate and communicating with the first hole through the fourth hole, and
forming a connecting material electrically connecting between the first conductive layer and the second conductive layer in the first hole and the fourth hole by filling the first hole and the fourth hole with a conductive material,
wherein the first glass substrate includes a first surface and a second surface opposite to the first surface,
the first conductive layer is located over the first surface,
the second glass substrate includes a third surface opposed to the first conductive layer and a fourth surface opposite to the third surface,
the second conductive layer is located on the fourth surface,
the first hole includes a first opening formed on the fourth surface and a second opening formed on the third surface,
the second hole includes a third opening that is smaller than the first opening and is opposed to the second opening and a fourth opening that is formed on the second surface, and
a diameter of the fourth hole is larger than a diameter of the second opening and a diameter of the third opening.
12. The method according to claim 11 , further comprising:
forming the first hole, the fourth hole and a third hole penetrating the first conductive layer opposed to the first hole by irradiating first laser light to the second substrate.
13. The electronic apparatus according to claim 1 , wherein the second hole is branched and includes two of the fourth opening.
14. The electronic apparatus according to claim 1 , wherein a diameter of the second hole is constant between the third opening and the fourth opening.