Electronic device and manufacturing method thereof
View Patent ↗According to one embodiment, an electronic device includes a first substrate including a first basement and a first conductive layer, a second substrate including a second basement which is disposed to be apart from the first conductive layer and includes a first surface opposed to the first conductive layer and a second surface opposite to the first surface, and a second conductive layer disposed on the second surface, the second substrate including a first hole passing through the second basement, and a connecting material passing through the first hole to electrically connect the first conductive layer and the second conductive layer, wherein the first hole is shaped as a funnel.
1. A manufacturing method of an electronic device, comprising:
preparing a first substrate including a first conductive layer and a second substrate which is apart from the first conductive layer;
forming a concavity in the second substrate at a second surface which is opposite to a first surface which is opposed to the first substrate;
etching the first substrate and the second substrate to decrease thickness thereof and to expand the concavity;
forming a second conductive layer on the second surface and inside the concavity;
irradiating an area where the concavity is formed with a laser light to form a hole penetrating at least the second conductive layer in the concavity and the second substrate; and
forming a connecting material electrically connecting the first conductive layer and the second conductive layer via the hole.
2. The manufacturing method according to claim 1 , wherein a second concavity is formed in the first substrate to be opposed to the hole during the irradiating with the laser light.
3. The manufacturing method according to claim 1 , wherein the concavity is expanded to penetrate the second substrate by the etching.
4. The manufacturing method according to claim 1 , wherein an end of the connecting material in the hole is between the first substrate and the second surface along a thickness direction of the second substrate.