IP Library Granted Patent US 9,851,507
Granted Patent B1
US 9,851,507 · App. 15/671,905 · Granted Dec 26, 2017

Broadband restricted MMI-based polarization beam splitter

Inventor: Jie Lin (Santa Clara, CA)
Assignee: INPHI CORPORATION
G02B6/2773G02B6/102G02B6/105G02B6/2726
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Quick Facts
Patent No.
US 9,851,507
App. No.
15/671,905
Granted
Dec 26, 2017
Kind
B1
Abstract

A compact polarization beam splitter is formed by cascading two stages of three restricted MMIs. Each MMI is configured to set ultra compact width and length for a rectangular waveguide body to limit no more than 4 modes therein working as a polarization beam splitter in a 50 nm wavelength window around 1300 nm. Each MMI is further configured to couple an input at a first end and a TE bar output and a TM cross output at a second end of the rectangular waveguide body. The locations of the input/output waveguide ports are designated to be a distance of ⅙ of the width away from a middle line from the first end to the second end. Two second-stage MMIs have their inputs coupled to the TE bar output and the TM cross output of the first-stage MMI and provide a second-stage TE bar output and a second-stage TM cross output, respectively.

Claims (25)

1. A polarization beam splitter for a broad wavelength window comprising:

a waveguide body in rectangular shape with a width and a length configured to yield no more than four modes;

an input waveguide being coupled to a first end of the waveguide body at a location having a first distance away from a middle line along the length;

a pair of output waveguides being coupled to a second end of the waveguide body at two mirrored locations having a second distance away from the middle line;

wherein the first distance is substantially the same as the second distance equal to ⅙ of the width, so as to provide an polarization beam splitting mechanism for splitting a light signal in a broad band received at the input waveguide to a primarily TE polarization mode signal at one of the pair of output waveguide located at a same side of the middle line and a primarily TM polarization mode signal at another one of the pair of output waveguide.

2. The polarization beam splitter of claim 1 , wherein the waveguide body is silicon nitride material formed on a silicon-on-insulator (SOI) substrate and configured to be a restricted multimode interference device for treating the light signal in the broad band from 1270 nm to 1330 nm.

3. The polarization beam splitter of claim 2 , wherein the input waveguide and the pair of output waveguides are silicon nitride material formed on the same SOI substrate in a single patterning process.

4. The polarization beam splitter of claim 2 , wherein the width of the waveguide body is selected to be 2 μm and the length of the waveguide body is selected to be 61.25 μm in association with the silicon nitride material being used.

5. The polarization beam splitter of claim 3 , wherein the input waveguide has a width of 0.7 μm or smaller.

6. The polarization beam splitter of claim 3 , wherein each output waveguide has a width of 0.5 μm or smaller.

7. The polarization beam splitter of claim 2 , wherein one of the pair of output waveguide carrying the primarily TM/TE polarization mode signal comprises 1.5 dB or less in transmission loss for the TM/TE mode signal but at least 10 dB or greater in transmission loss for TE/TM polarization mode signal split from a same input light signal over the broad band from 1270 nm to 1330 nm received from the input waveguide.

8. The polarization beam splitter of claim 1 , wherein the waveguide body and both the input waveguide and the pair of output waveguides are silicon material formed on a same SOI substrate with the length of the waveguide body being selected to be 45 mm for a wavelength window across C-band.

9. A compact polarization beam splitter for a broad wavelength window comprising:

a first birefringence waveguide device configured to receive a light signal at a first input port and split the light signal to a first TE polarization mode signal at a first bar output port and a first TM polarization mode signal at a first cross output port;

a second birefringence waveguide device having a second input port coupled to the first bar output port and at least a second bar output port for further passing a second TE polarization mode signal;

a third birefringence waveguide device having a third input port coupled to the first cross output port and at least a second cross output port for further passing a second TM polarization signal;

wherein each of the second birefringence waveguide device and the third birefringence waveguide device is configured to be substantially the same as the first birefringence waveguide device comprising:

a waveguide body in rectangular shape configured to yield no more than four modes;

an input waveguide being coupled to a first end of the waveguide body at a location having a first distance away from a middle line along the length;

a pair of output waveguides being coupled to a second end of the waveguide body at two mirrored locations having a second distance away from the middle line;

wherein the first distance is substantially the same as the second distance equal to ⅙ of the width, so as to provide a polarization beam splitting mechanism for splitting a light signal in a broad wavelength window received at the input waveguide to a primarily TE polarization mode signal at one of the pair of output waveguide located at same side of the middle line and a primarily TM polarization mode signal at another one of the pair of output waveguide.

10. The compact polarization beam splitter of claim 9 wherein each of the first, second, and third birefringence waveguide devices comprises a restricted multimode interference device having a total length less than 100 μm from the input waveguide to the output waveguide including its rectangular waveguide body.

11. The compact polarization beam splitter of claim 9 wherein the each of the first, second, and third birefringence waveguide devices comprises patterned planar waveguides made by silicon nitride material overlying a single silicon-on-insulator (SOI) substrate.

12. The compact polarization beam splitter of claim 9 wherein the first TM/TE polarization mode signal at the first bar/cross output port is associated with a transmission loss of less than 1.5 dB relative to the light signal at the first input port and a minor TE/TM polarization mode signal with extinction ratio greater than 10 dB over the broad wavelength window from 1270 nm to 1330 nm.

13. The compact polarization beam splitter of claim 9 wherein the second TM/TE polarization mode signal at the second bar/cross output port is associated with a transmission loss of less than 2.5 dB relative to the light signal at the first input port and a minor TE/TM polarization mode signal with extinction ratio greater than 20 dB over the broad wavelength window from 1270 nm to 1330 nm.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 27, 2021
From: CAVIUM INTERNATIONAL
To: MARVELL ASIA PTE LTD.
Reel/Frame 057336/0873 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 25, 2021
From: MARVELL TECHNOLOGY CAYMAN I
To: CAVIUM INTERNATIONAL
Reel/Frame 057279/0519 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 23, 2021
From: INPHI CORPORATION
To: MARVELL TECHNOLOGY CAYMAN I
Reel/Frame 056649/0823 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2017
From: LIN, JIE
To: INPHI CORPORATION
Reel/Frame 043250/0104 →
Continuity (2)
Continuation 15375033 · Dec 9, 2016
Continuation 15147803 · May 5, 2016