Electron photoemission with tunable excitation and transport energetics
View Patent ↗A photocathode for use in vacuum electronic devices has a bandgap gradient across the thickness (or depth) of the photocathode between the emitting surface and the opposing surface. This bandgap gradient compensates for depth-dependent variations in transport energetics. When the bandgap energy E BG (z) is increased for electrons with shorter path lengths to the emitting surface and decreased for electrons with longer path lengths to the emitting surface, such that the sum of E BG (z) and the scattering energy is substantially constant or similar for electrons photoexcited at all locations within the photocathode, the energies of the emitted electrons may be more similar (have less variability), and the emittance of the electron beam may be desirably decreased. The photocathode may be formed of a III-V semiconductor such as InGaN or an oxide semiconductor such as GaInO.
1. A photocathode, the photocathode comprising an emitting surface and an opposing surface opposite the emitting surface, the emitting surface and the opposing surface being separated from each other by a depth of the photocathode,
the photocathode comprising a material having a bandgap, the bandgap having a bandgap energy configured to vary within the material along the depth of the photocathode, such that the bandgap energy varies as a gradient along the depth of the photocathode, and a sum of the bandgap energy and electron transport energetics is constant throughout the depth of the photocathode.
2. The photocathode of claim 1 , wherein the bandgap gradient includes a lower bandgap energy at the opposing surface and a higher bandgap energy at the emitting surface.
3. The photocathode of claim 1 , wherein the material having the bandgap comprises a stoichiometry that varies as a gradient along the depth of the photocathode, and the stoichiometry along the depth of the photocathode dictates the bandgap energy along the depth of the photocathode.
4. The photocathode of claim 1 , wherein the material having the bandgap is a III-V semiconductor material.
5. The photocathode of claim 1 , wherein the material having the bandgap is an oxide semiconductor material.
6. The photocathode of claim 3 , wherein the material having the bandgap is a ternary semiconductor material comprising a first element, a second element, and a third element;
the first element having a constant concentration throughout the depth of the photocathode;
the second element having a concentration higher than that of the third element at the emitting surface; and
the third element having a concentration higher than that of the second element at the opposing surface.
7. The photocathode of claim 6 , wherein the material having the bandgap substantially comprises the first element and the second element at the emitting surface, and substantially comprises the first element and the third element at the opposing surface.
8. The photocathode of claim 6 , wherein at least one of the first, second, and third elements is located in an interstitial position.
9. The photocathode of claim 4 , wherein the material is InGaN, GaInSb, or GaInAs.
10. The photocathode of claim 9 , wherein the material is InGaN.
11. The photocathode of claim 5 , wherein the material is GaInO.
12. The photocathode of claim 1 , wherein the material having the bandgap has a grain size as large as the depth of the photocathode.
13. The photocathode of claim 3 , wherein the bandgap has a resolution of about 0.5 nm to about 1.5 nm.
14. A method of fabricating the photocathode of claim 1 , the method comprising:
computing a transport energetics profile for the photocathode;
computing a complementary bandgap profile based on the transport energetics profile; and
depositing a composition according to the complementary bandgap profile.
15. A vacuum electronic device comprising:
the photocathode of claim 1 ;
an anode; and
a light source,
wherein the photocathode and anode are configured to be under vacuum and the light source is directed toward the photocathode.
16. A method of generating a low-emittance electron beam, the method comprising:
computing a depth profile of electron transport energetics for a photocathode comprising a material having a bandgap;
computing a complementary depth profile of bandgap energy for the photocathode, wherein a sum of the electron transport energetics and bandgap energy is constant throughout the depth of the photocathode;
depositing elements comprised in the material having a bandgap to form a stoichiometry gradient along the depth of the photocathode to create an experimental depth profile of bandgap energy that matches the computed depth profile of bandgap energy;
combining the photocathode with an anode under a high vacuum environment;
biasing the photocathode toward a negative voltage; and
irradiating the photocathode with a light source.