IP Library Granted Patent US 10,236,164
Granted Patent B2
US 10,236,164 · App. 15/682,605 · Granted Mar 19, 2019

Refractory metal plates with improved uniformity of texture

Inventors: Peter R. Jepson (Newbury, MA); Dincer Bozkaya (Framingham, MA)
Assignee: H.C. STARCK INC.
H01J37/3426B21B1/227B22F3/18C22F1/18C23C14/3414B21B39/04B21B2265/24B21B2267/065B21B2273/02Y10T428/12Y10T428/12014Y10T428/12458
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Quick Facts
Patent No.
US 10,236,164
App. No.
15/682,605
Granted
Mar 19, 2019
Kind
B2
Abstract

A refractory metal plate is provided. The plate has a center, a thickness, an edge, a top surface and a bottom surface, and has a crystallographic texture (as characterized by through thickness gradient, banding severity; and variation across the plate, for each of the texture components 100//ND and 111//ND, which is substantially uniform throughout the plate.

Claims (25)

1. A refractory metal plate having a center, a thickness, an edge, a top surface, and a bottom surface, the refractory metal plate having a crystallographic texture as characterized by through thickness gradient, banding severity, and variation across the plate for at least one of the texture components 100//ND or 111//ND, using electron back-scatter diffraction with a 15 μm step in both the horizontal and vertical directions for each measurement, wherein:

an average through-thickness gradient is less than or equal to 6% per mm for 111//ND, and

a maximum through-thickness gradient is less than or equal to 13% per mm for 111//ND.

2. The refractory metal plate of claim 1 , wherein the maximum through-thickness gradient is less than or equal to 9% per mm for 111//ND.

3. The refractory metal plate of claim 1 , wherein the maximum through-thickness gradient is less than or equal to 8% per mm for 111//ND.

4. The refractory metal plate of claim 1 , wherein the average through-thickness gradient is less than or equal to 4% per mm for 111//ND.

5. The refractory metal plate of claim 1 , wherein the average through-thickness gradient is less than or equal to 3% per mm for 111//ND.

6. The refractory metal plate of claim 1 , wherein the refractory metal plate has a grain size that is less than 60 μm.

7. The refractory metal plate of claim 1 , wherein the metal plate is at least 99.95% pure refractory metal.

8. The refractory metal plate of claim 1 , wherein the refractory metal comprises tantalum.

9. The refractory metal plate of claim 1 , wherein the refractory metal comprises niobium.

10. A refractory metal plate having a center, a thickness, an edge, a top surface, and a bottom surface, the refractory metal plate having a crystallographic texture as characterized by through thickness gradient, banding severity, and variation across the plate for at least one of the texture components 100//ND or 111//ND, using electron back-scatter diffraction with a 15 μm step in both the horizontal and vertical directions for each measurement, wherein an average banding severity is less than or equal to 6% per mm for 111//ND.

11. The refractory metal plate of claim 10 , wherein the average banding severity is less than or equal to 5% per mm for 111//ND.

12. The refractory metal plate of claim 10 , wherein the average banding severity is less than or equal to 4% per mm for 111//ND.

13. The refractory metal plate of claim 10 , wherein the refractory metal plate has a grain size that is less than 60 μm.

14. The refractory metal plate of claim 10 , wherein the metal plate is at least 99.95% pure refractory metal.

15. The refractory metal plate of claim 10 , wherein the refractory metal comprises tantalum.

16. The refractory metal plate of claim 10 , wherein the refractory metal comprises niobium.

17. A refractory metal plate having a center, a thickness, an edge, a top surface, and a bottom surface, the refractory metal plate having a crystallographic texture as characterized by through thickness gradient, banding severity, and variation across the plate for at least one of the texture components 100//ND or 111//ND, using electron back-scatter diffraction with a 15 μm step in both the horizontal and vertical directions for each measurement, wherein a maximum banding severity is less than or equal to 8% per mm for 111//ND.

18. The refractory metal plate of claim 17 , wherein the average banding severity is less than or equal to 7% per mm for 111//ND.

19. The refractory metal plate of claim 17 , wherein the average banding severity is less than or equal to 5% per mm for 111//ND.

20. The refractory metal plate of claim 17 , wherein the refractory metal plate has a grain size that is less than 60 μm.

21. The refractory metal plate of claim 17 , wherein the metal plate is at least 99.95% pure refractory metal.

22. The refractory metal plate of claim 17 , wherein the refractory metal comprises tantalum.

23. The refractory metal plate of claim 17 , wherein the refractory metal comprises niobium.

Assignments (3)
CHANGE OF NAME Recorded Apr 5, 2022
From: H.C. STARCK INC.
To: MATERION NEWTON INC.
Reel/Frame 059596/0925 →
SECURITY INTEREST Recorded Nov 1, 2021
From: H.C. STARCK INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 057978/0970 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 22, 2017
From: JEPSON, PETER R.; BOZKAYA, DINCER
To: H.C. STARCK INC.
Reel/Frame 043351/0490 →
Continuity (4)
Continuation 14751224 · Jun 26, 2015
Continuation 12221646 · Aug 5, 2008
Provisional Application 60963616 · Aug 6, 2007
Related Publication 20180040462A1 · Feb 8, 2018