Gap filling dielectric materials

1. A composition for planarizing a semiconductor device surface, the composition comprising:

a resin, the resin consisting of a poly(methyl silsesquioxane) resin ranging from 1 wt. % to 40 wt. % of the composition, the poly(methyl silsesquioxane) resin having a weight average molecular weight between 500 Da and 5,000 Da; and

an aminopropyltriethoxysilane salt ranging from 0.01 wt. % to 0.20 wt. % of the composition; and

at least one solvent comprising the balance of the composition; and

optionally, a surfactant ranging from 0.25 wt. % to 1.0 wt. % of the composition.

2. The composition of claim 1 , wherein the aminopropyltriethoxysilane salt includes aminopropyltriethoxysilane triflate.

3. The composition of claim 1 , wherein the at least one solvent is a solvent mixture including:

propylene glycol methyl ether acetate; and

n-butyl acetate, the ratio by weight of the propylene glycol methyl ether acetate to n-butyl acetate ranging from 0.5:1 to 2:1.

4. The composition of claim 3 , wherein the solvent mixture further includes a high boiling point solvent ranging from 0.05 wt. % to 5 wt. % of the composition, the high boiling point solvent having a boiling point ranging from 154° C. to 274° C.

5. The composition of claim 4 , wherein the high boiling point solvent includes at least one of 1-octanol, benzyl alcohol, hexyl alcohol, ethylene glycol, dipropylene glycol, dipropylene glycol methyl ether, dipropylene glycol n-propyl ether, tripropylene glycol n-butyl ether, anisole, or propylene carbonate.

6. The composition of claim 1 , further comprising the surfactant.

7. The composition of claim 6 , wherein the surfactant includes a polyether-modified polydimethylsiloxane surfactant.

8. The composition of claim 1 , wherein the poly(methyl silsesquioxane) has a weight average molecular weight between 1,200 Da and 4,300 Da.

9. A method for making a planarizing composition, the method comprising:

providing a resin, the resin consisting of a poly(methyl silsesquioxane) resin having a weight average molecular weight between 500 Da and 5,000 Da;

providing one or more solvents;

dissolving the poly(methyl silsesquioxane) resin in the one or more solvents to form a poly(methyl silsesquioxane) solution; and

dissolving an aminopropyltriethoxysilane salt in the poly(methyl silsesquioxane) solution to form the planarizing composition.

10. The method of claim 9 , wherein the aminopropyltriethoxysilane salt includes aminopropyltriethoxysilane triflate.

11. The method of claim 10 , wherein providing the one more solvents includes blending together propylene glycol methyl ether acetate and n-butyl acetate, the ratio by weight of the propylene glycol methyl ether acetate ton-butyl acetate ranging from 0.5:1 to 2:1.

12. The method of claim 11 , wherein providing the one or more solvents further includes blending a high boiling point solvent together with the propylene glycol methyl ether acetate and the n-butyl acetate, the high boiling point solvent having a boiling point ranging from 154° C. to 274° C.

13. The method of claim 9 , further comprising dissolving a surfactant in the poly(methyl silsesquioxane) solution.

14. The method of claim 9 , further comprising filtering the planarizing composition through a series of at least two 0.1 micron filters.

15. A planarizing film for a semiconductor device, the film comprising:

a cured polymer, the cured polymer consisting of poly(methyl silsesquioxane) formed of poly(methyl silsesquioxane) polymer chains having a weight average molecular weight between 500 Da and 5,000 Da;

a residue of an aminopropyltriethoxysilane salt; and

optionally, a residue of a surfactant.

16. The planarizing film of claim 15 , wherein

the residue of the aminopropyltriethoxysilane salt includes a residue of aminopropyltriethoxysilane triflate.