Thermal flow meter including a cover mounted on a housing and where a bypass passage is formed by the cover and bypass passage trench
The present invention has been made to improve measurement accuracy of a thermal flow meter. In the thermal flow meter according to the invention, a circuit package ( 400 ) that measures a flow rate is molded in a first resin molding process. In a second resin molding process, a housing ( 302 ) having an inlet trench ( 351 ), a bypass passage trench on frontside ( 332 ), an outlet trench ( 353 ), and the like are formed through resin molding, and an outer circumferential surface of the circuit package ( 400 ) produced in the first resin molding process is enveloped by a resin in the second resin molding process to fix the circuit package ( 400 ) to the housing ( 302 ).
1. A thermal flow meter comprising:
a circuit package having a heat resistor formed on a semiconductor diaphragm and a lead terminal connected electrically to the semiconductor diaphragm, wherein the circuit package is molded with a first resin so as to enclose the lead terminal in the circuit package;
a housing formed by a second resin, a thermal expansion coefficient of which is different from a thermal expansion coefficient of the first resin; and
a flange,
wherein the circuit package has a portion covered with the second resin and a portion exposed from the second resin,
wherein the circuit package is fixed to the housing by the portion covered with the second resin, and
wherein an area of the portion exposed from the second resin in the circuit package is larger than an area of the portion covered with second resin in the circuit package.
2. The thermal flow meter according to claim 1 , wherein the portion exposed from the second resin is one of plural portions exposed from the second resin.
3. The thermal flow meter according to claim 1 , wherein the portion exposed from the second resin is a measurement surface having the semiconductor diaphragm.
4. The thermal flow meter according to claim 1 , wherein a gap is provided between the housing and the portion exposed from the second resin.
5. The thermal flow meter according to claim 1 , wherein the housing has a fixing portion, and the fixing portion is a part of a wall surface of a bypass passage, and fixes the circuit package at a part closer to the flange than the semiconductor diaphragm so that a part of the semiconductor diaphragm is exposed in the bypass passage.
6. The thermal flow meter according to claim 1 , wherein shapes of the portion covered with the second resin of both sides of the circuit package are the same.