Apparatus and method of manufacturing radiation detection panel

1. A method of manufacturing a radiation detection panel, comprising:

positioning a photoelectric conversion substrate vertically above an evaporation source such that a deposition surface of the photoelectric conversion substrate is exposed to the evaporation source and inclined with respect to a vertical axis; and

evaporating a scintillator material and emitting the scintillator material vertically upward by the evaporation source to deposit a fluorescent film on the deposition surface,

wherein

when the scintillator material is deposited on the deposition surface, the photoelectric conversion substrate is rotated,

the photoelectric conversion substrate is positioned to satisfy 45′≤θ≤70° at a center of the deposition surface, where θ is an angle made inside between an incident direction of the scintillator material and a normal line of the deposition surface; and

the photoelectric conversion substrate is rotated by setting a rotation axis as an axis along a normal line of the center of the deposition surface.

2. The method of claim 1 , wherein

the photoelectric conversion substrate is positioned to satisfy 50°≤θ≤65° at the center of the deposition surface.

3. The method of claim 1 , wherein

an angle between a vertical axis passing through the scintillator material and the deposition surface is less than 30°.

4. The method of claim 1 , wherein

a vacuum deposition method in which deposition is performed under a vacuum pressure of 1×10 −2 Pa or less is utilized.

5. The method of claim 1 , wherein

the photoelectric conversion substrate is rotated at a rotational speed of 4 rpm or more.

6. The method of claim 1 , wherein

the scintillator material contains cesium iodide (CsI) as a main component.