FinFET with reduced parasitic capacitance
A semiconductor device including at least one fin extending upward from a substrate and a gate on the substrate, wherein the gate includes outer sidewalls, wherein the fin extend through a width of the gate. A spacer material can be adjacent to the outer sidewalls of the gate, wherein a top surface of the spacer material is below the top surface of the gate and above the top surface of the fin. The semiconductor device can also include an epitaxial semiconductor layer over the fins on each side of the spacer material. A low-k dielectric material can be deposited above each epitaxial semiconductor layer. The semiconductor device also includes a dielectric top layer forming a top surface of the transistor, wherein the dielectric top layer seals an air gap between the top surface of the fins and the dielectric top layer.
1. A semiconductor device, comprising:
at least one fin on a substrate;
a gate on the substrate, wherein the gate includes outer sidewalls, wherein the at least one fin extends through a width of the gate;
spacer material adjacent to the outer sidewalls of the gate, wherein a top surface of the spacer material is below a top surface of the gate and above a top surface of the at least one fin;
an epitaxial semiconductor layer over the at least one fin on each side of the spacer material;
a low-k dielectric material above the epitaxial semiconductor layer, wherein the low-k dielectric material is adjacent to the spacer material;
a dielectric top layer forming a top surface of the transistor; and
an air gap sealed between the dielectric top layer and the top surface of the at least one fin, a bottom surface of the air gap being defined by the top surface of the at least one fin and the top surface of the spacer material, the top surface of the spacer material being above the top surface of the at least one fin.
2. The semiconductor device of claim 1 , wherein the air gap has a width of about 3 nm to about 10 nm.
3. The semiconductor device of claim 1 , wherein the air gap is continuous from the top surface of the at least one fin to a pinch-off region defined by the dielectric top layer that seals the air gap.
4. The semiconductor device of claim 1 , wherein the dielectric top layer includes nitrides or oxides.