Semiconductor device, display device and manufacturing method for semiconductor device
View Patent ↗A semiconductor device includes a substrate having an insulating surface; a circuit including a transistor provided on the insulating surface and including a semiconductor layer, an insulating layer and a conductive layer; and a line provided on the insulating surface, the line extending in a first direction. The line includes a core containing a resin material and a conductive portion covering the core as seen in a cross-sectional view taken along a second direction crossing the first direction.
1. A semiconductor device, comprising:
a substrate having an insulating surface;
a circuit including a transistor on the insulating surface and including a semiconductor layer, a first insulating layer and a conductive layer; and
a line on the insulating surface, the line extending in a first direction,
wherein the line includes a core containing a resin material and a conductive portion covering the core as seen in a cross-sectional view taken along a second line crossing the first direction,
the conductive portion includes a first conductive layer and a second conductive layer,
a first end of the first conductive layer is in contact with a first end of the second conductive layer at a first region, and
a second end of the first conductive layer is in contact with a second end of the second conductive layer at a second region.
2. The semiconductor device according to claim 1 , further comprising a second insulating layer in contact with a top portion or a bottom portion of the conductive portion.
3. The semiconductor device according to claim 1 , wherein
the core is between the first region and the second region in a planar view.
4. The semiconductor device according to claim 3 , wherein a side surface of the first conductive layer and a side surface of the second conductive layer have portions continuous with each other.
5. The semiconductor device according to claim 1 , wherein an end of the first conductive layer is inner to, or outer to, an end of the second conductive layer.
6. The semiconductor device according to claim 1 , wherein the substrate is flexible.
7. A display device, comprising:
a substrate having an insulating surface; and
a display region,
wherein
the display region includes a plurality of pixels each including a transistor, the transistor being on the insulating surface and including a semiconductor layer, a first insulating layer and a conductive layer,
the display region further includes a plurality of scanning lines extending in a first direction, a plurality of signal lines extending in a second direction crossing the first direction, and a plurality of power supply lines extending in the first direction or the second direction,
each of the plurality of scanning lines, each of the plurality of signal lines or each of the power supply lines includes a core containing a resin material and a conductive portion covering the core in a cross-sectional view taken along a line crossing the first direction and the second direction,
the conductive portion includes a first conductive layer and a second conductive layer,
a first end of the first conductive layer is in contact with a first end of the second conductive layer at a first region, and
a second end of the first conductive layer is in contact with a second end of the second conductive layer at a second region.
8. The display device according to claim 7 , further comprising a second insulating layer provided in contact with a top portion or a bottom portion of the conductive portion.
9. The display device according to claim 7 , wherein
the core is between the first region and the second region in a planar view.
10. The display device according to claim 9 , wherein a side surface of the first conductive layer and a side surface of the second conductive layer have portions continuous with each other.
11. The display device according to claim 7 , wherein an end of the first conductive layer is inner to, or outer to, an end of the second conductive layer.
12. The display device according to claim 7 , wherein the substrate is flexible.
13. A manufacturing method for a semiconductor device, the method comprising:
forming a first conductive layer extending in a first direction on a substrate having an insulating surface;
forming a resin layer extending in the first direction on the first conductive layer so as to expose both of two ends of the first conductive layer; and
forming a second conductive layer extending in the first direction on the first conductive layer and the resin layer, wherein
a first end of the first conductive layer is in contact with a first end of the second conductive layer at a first region, and
a second end of the first conductive layer is in contact with a second end of the second conductive layer at a second region.
14. The manufacturing method according to claim 13 , further comprising forming an insulating layer covering the insulating surface and the second conductive layer.
15. The manufacturing method according to claim 13 , wherein the resin layer is provided between the first region and the second region in a planar view.