IP Library Granted Patent US 10,543,564
Granted Patent B2
US 10,543,564 · App. 15/702,584 · Granted Jan 28, 2020

Wafer alignment with restricted visual access

Inventor: Thomas Pass (San Jose, CA)
Assignee: SunPower Corporation
B23K26/032H01L21/67259H01L21/681H01L31/18G03F9/7084G03F9/7088
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Quick Facts
Patent No.
US 10,543,564
App. No.
15/702,584
Granted
Jan 28, 2020
Kind
B2
Abstract

Wafer alignment with restricted visual access has been disclosed. In an example, a method of processing a substrate for fabricating a solar cell involves supporting the substrate over a stage. The method involves forming a substantially opaque layer over the substrate. The substantially opaque layer at least partially covers edges of the substrate. The method involves performing fit-up of the substantially opaque layer to the substrate. The method involves illuminating the covered edges of the substrate with light transmitted through the stage, and capturing a first image of the covered edges of the substrate based on the light transmitted through the stage. The method further includes determining a first position of the substrate relative to the stage based on the first image of the covered edges. The substrate may be further processed based on the determined first position of the substrate under the substantially opaque layer.

Claims (25)

1. A system for processing a substrate for fabrication of a solar cell, the system comprising:

a stage configured to support the substrate;

a layer formation station configured to form a substantially opaque layer over the substrate and to fit-up the substantially opaque layer to the substrate, wherein the substantially opaque layer fully covers one or more edges of the substrate;

a light source configured to illuminate the fully covered one or more edges of the substrate through the stage;

an image sensor configured to capture a first image of the fully covered one or more edges of the substrate based on the light transmitted through the stage;

a computing device configured to determine a first position of the substrate relative to the stage based on the first image of the fully covered one or more edges; and

a processing station configured to process the substrate based on the determined first position of the substrate under the substantially opaque layer.

2. The system of claim 1 , wherein:

the layer formation station is configured to:

place a metal sheet over the substrate, and

apply pressure to the metal sheet.

3. The system of claim 2 , wherein the processing station comprises a laser to process at least the metal sheet or a metal layer of the substrate.

4. The system of claim 3 , further comprising a half-silvered mirror or a shutter disposed between the stage and the image sensor to protect the image sensor from the laser when processing the substrate.

5. A system for processing a substrate for fabrication of a solar cell, the system comprising:

a stage configured to support the substrate;

a layer formation station configured to form a substantially opaque layer over the substrate and to fit-up the substantially opaque layer to the substrate, wherein the substantially opaque layer fully covers one or more edges of the substrate;

a light source configured to illuminate the fully covered one or more edges of the substrate through the stage;

an image sensor configured to capture a first image of the fully covered one or more edges of the substrate based on the light transmitted through the stage; and

a computing device configured to determine a first position of the substrate relative to the stage based on the first image of the fully covered one or more edges.

6. The system of claim 5 , wherein:

the layer formation station is configured to:

place a metal sheet over the substrate, and

apply pressure to the metal sheet.

7. The system of claim 6 , further comprising a half-silvered mirror disposed between the stage and the image sensor to protect the image sensor from the laser.

8. The system of claim 6 , further comprising a shutter disposed between the stage and the image sensor to protect the image sensor from the laser.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 8, 2025
From: TOTALENERGIES SE; TOTALENERGIES SOLAR INTL
To: MAXEON SOLAR PTE. LTD.
Reel/Frame 073059/0081 →
SECURITY INTEREST Recorded Jun 27, 2024
From: MAXEON SOLAR PTE. LTD.
To: DB TRUSTEES (HONG KONG) LIMITED
Reel/Frame 067924/0062 →
SECOND LIEN SECURITY INTEREST AGREEMENT Recorded Jun 26, 2024
From: MAXEON SOLAR PTE. LTD
To: DB TRUSTEES (HONG KONG) LIMITED
Reel/Frame 071343/0553 →
SECURITY INTEREST Recorded Jun 5, 2024
From: MAXEON SOLAR PTE. LTD.
To: DB TRUSTEES (HONG KONG) LIMITED
Reel/Frame 067637/0598 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 24, 2023
From: SUNPOWER CORPORATION
To: MAXEON SOLAR PTE. LTD.
Reel/Frame 062699/0875 →
Continuity (2)
Division 14135147 · Dec 19, 2013
Related Publication 20180001420A1 · Jan 4, 2018