Method of manufacturing semiconductor device

1. A method of manufacturing a semiconductor device including a diode, the method comprising:

implanting charged particles into a first range and a second range in a semiconductor substrate from at least one of a first surface of the semiconductor substrate and a second surface of the semiconductor substrate located on an opposite side of the first surface so as to increase crystal defect densities in the first range and the second range;

implanting n-type impurities into the first range from the first surface so as to make a region amorphous by changing the region from crystal state to amorphous state, the region being in the first range and disposed at the first surface;

irradiating the first surface with a first laser after the implantation of the charged particles and the implantation of the n-type impurities so as to heat the first range and the second range, wherein the crystal defect density in the second range decreases more than the crystal defect density in the first range in the irradiation of the first laser so that a distribution is obtained after the irradiation of the first laser where the crystal defect density in the second range is lower than the crystal defect density in the first range; and

crystalizing the region which has been made amorphous in or after the irradiation of the first laser.

2. The method of claim 1 , wherein the crystallization comprises irradiating the first surface with second laser having a smaller wavelength than the first laser so as to heat the first range.

3. The method of claim 1 , wherein a diode is formed in the first range, and

an IGBT is formed in the second range.

4. The method of claim 1 , wherein the charged particles are electrons.