Processes for depositing silicon-containing films using halidosilane compounds
Processes for depositing silicon-containing films (e.g., silicon, amorphous silicon, silicon oxide, silicon nitride, silicon carbide, silicon oxynitride, silicon carbonitride, doped silicon films, and metal-doped silicon nitride films) are performed using halidosilane precursors. Examples of halidosilane precursor compounds described herein, include, but are not limited to, monochlorodisilane (MCDS), monobromodisilane (MBDS), monoiododisilane (MIDS), monochlorotrisilane (MCTS), and monobromotrisilane (MBTS), monoiodotrisilane (MITS). Also described herein are methods for depositing silicon containing films such as, without limitation, silicon, amorphous silicon, silicon oxide, silicon nitride, silicon carbide, silicon oxynitride, silicon carbonitride, doped silicon films, and metal-doped silicon nitride films, at one or more deposition temperatures of about 500° C. or less.
1. A method for forming a metal doped silicon nitride or silicon carbonitride film on at least one surface of a substrate by a deposition process selected from a chemical vapor deposition process and an atomic layer deposition process, the method comprising:
providing the at least one surface of the substrate in a reactor;
introducing at least one halidosilane precursor from the group consisting of monobromodisilane (MBDS), monoiododisilane (MIDS), monochlorotrisilane (MCTS), monobromotrisilane (MBTS), and monoiodotrisilane (MITS),
introducing a nitrogen-containing source into the reactor wherein the at least one halidosilane precursor and the nitrogen-containing source react, and
introducing a metal containing precursor into the reactor wherein at least one of the at least one halidosilane precursor and the nitrogen-containing source react with the metal containing precursor to form the metal doped silicon nitride or silicon carbonitride film on the at least one surface.
2. The method of claim 1 wherein the nitrogen-containing source is selected from the group consisting of ammonia, hydrazine, monoalkylhydrazine, dialkylhydrazine, organoamine, organodiamine, ammonia plasma, hydrazine plasma, nitrogen plasma, nitrogen/hydrogen plasma, organoamine plasma, organodiamine plasma and mixtures thereof.
3. The method of claim 2 wherein the nitrogen-containing source is a plasma that is generated in situ.
4. The method of claim 2 wherein the nitrogen-containing source is a plasma that is generated remotely.
5. The method of claim 1 wherein the metal containing precursor is selected from the group consisting of aluminum chloride (AlCl 3 ), trimethylaluminum, triethylaluminum, tris(dimethylamino)aluminum, tris(diethylamino)aluminum, boron chloride (BCl 3 ), trimethylborane, trimethylborone, triethylborane, tris(dimethylamino)borane, tris(diethylamino)borane, gallium chloride (GaCl 3 ), trimethylgallium, trimethylgallium, triethylgallium, tris(dimethylamino)gallium, tris(diethylamino)gallium.
6. A method for forming a silicon film on at least one surface of a substrate by a deposition process selected from a chemical vapor deposition process and an atomic layer deposition process, the method comprising:
providing the at least one surface of the substrate in a reactor;
introducing at least one halidosilane precursor comprising at least one member selected from the group consisting of monobromodisilane (MBDS), monoiododisilane (MIDS), monochlorotrisilane (MCTS), monobromotrisilane (MBTS), and monoiodotrisilane (MITS), and
introducing a hydrogen-containing source into the reactor wherein the at least one halidosilane precursor and the hydrogen-containing source react to form the silicon film on the at least one surface.
7. The method of claim 6 wherein the hydrogen-containing source is selected from the group consisting of hydrogen plasma, hydrogen/argon plasma, hydrogen/helium plasma, hydrogen, hydrogen/argon, hydrogen/helium, hydrogen/hydrogen chloride, hydrogen chloride, and mixtures thereof.
8. The method of claim 6 wherein the hydrogen-containing source is a plasma that is generated in situ.
9. The method of claim 6 wherein the hydrogen-containing source is a plasma that is generated remotely.
10. The method of claim 6 wherein the silicon film is selected from the group consisting of amorphous silicon, polycrystal silicon, microcrystal silicon, boron doped silicon, germanium doped silicon.