Semiconductor device, vehicle-mounted semiconductor device, and vehicle-mounted control device
Provided is a vehicle-mounted semiconductor device enabling a temperature increase of active elements to be restricted. A vehicle-mounted semiconductor device includes: a semiconductor substrate; a plurality of active elements formed on the semiconductor substrate; a plurality of trenches surrounding the plurality of active elements to insulate and separate the active elements; and a terminal connecting in parallel the plurality of active elements insulated and separated by different trenches among the plurality of trenches and connected to an outside.
1. A vehicle-mounted semiconductor device comprising:
a semiconductor substrate;
a plurality of active elements formed on the semiconductor substrate, wherein each of the plurality of active elements comprises at least one element piece;
a plurality of trenches surrounding the plurality of active elements to insulate and separate the active elements, wherein each active element is surrounded by a single trench; and
a terminal connecting in parallel the plurality of active elements insulated and being connected to an outside, wherein
the plurality of active elements include a first active element, a second active element immediately adjacent to the first active element, a third active element immediately adjacent to the second active element, a fourth active element immediately adjacent to the third active element, and a fifth active element immediately adjacent to the fourth active element,
the second and fourth active elements have more element pieces than the third active element, and the first and fifth active elements have more element pieces than both the second active element and the fourth active element, and
a distance between the first active element and the second active element is smaller than a distance between the second active element and the third active element.
2. The vehicle-mounted semiconductor device according to claim 1 , wherein
the single trench surrounding the first active element is a first trench and the single trench surrounding the second active element is a second trench, and
an area surrounded by the first trench or an area of the active element surrounded by the first trench and an area surrounded by the second trench or an area of the active element surrounded by the second trench differ.
3. The vehicle-mounted semiconductor device according to claim 1 , wherein
the single trench surrounding the first active element is a first trench, the single trench surrounding the second active element is a second trench, and the third active element has a third trench, and
a distance between the first trench and the second trench and a distance between the second trench and the third trench differ.
4. The vehicle-mounted semiconductor device according to claim 1 , wherein
the single trench surrounding a fourth active element is a fourth trench surrounds a fourth active element;
an area surrounded by of the fourth trench is smaller than an area surrounded by of the first trench and an area surrounded by of the second trench.
5. The vehicle-mounted semiconductor device according to claim 2 , wherein
a total number of element pieces provided is set so that a first heat generation amount and a second heat generation amount differ when the terminal is connected to an external circuit to drive the vehicle-mounted semiconductor device.
6. The vehicle-mounted semiconductor device according to claim 5 , wherein
at least the distance between the trenches, and the number of element pieces provided are set so that a heat generation distribution on the semiconductor substrate is uniform.
7. The vehicle-mounted semiconductor device according to claim 1 , wherein
an area surrounded each trench is smaller as the trench is closer to a center part of the semiconductor substrate.
8. The vehicle-mounted semiconductor device according to claim 1 , wherein
the terminal includes an input terminal, a control terminal, and an output terminal, and
the input terminal is connected to respective input units of the plurality of active elements, the control terminal is connected to respective control units of the plurality of active elements, and the output terminal is connected to respective output units of the plurality of active elements.
9. The vehicle-mounted semiconductor device according to claim 1 , wherein the vehicle-mounted semiconductor device is a MOSFET, the input terminal is a drain terminal, the control terminal is a gate terminal, and the output terminal is a source terminal.
10. The vehicle-mounted semiconductor device according to claim 1 , wherein
the semiconductor substrate is an SOI substrate, and
a depth of at least one trench is equal to a thickness of an Si active layer.