Plasma generator and method for setting an ION ratio
A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.
1. A plasma generator comprising:
a piezoelectric transformer comprising an end face and configured to directly ionize a process gas by a high voltage generated at the end face;
an ion separation electrode; and
a drive circuit configured to apply a potential to the ion separation electrode,
wherein the process gas is ionized at the end face itself,
wherein the drive circuit comprises at least one diode, and
wherein the drive circuit is configured to reverse a polarity of a potential applied to the diode, thereby inverting a ratio of positive ions generated and negative ions generated, and
wherein the drive circuit has two high-voltage reed relays to switch between a positive potential and a negative potential.
2. The plasma generator according to claim 1 , wherein the plasma generator is suitable for the process gas to flow through it, and wherein the process gas is ionized by the piezoelectric transformer and is subsequently guided through the ion separation electrode.
3. The plasma generator according to claim 1 , wherein the potential at the ion separation electrode defines the ratio of the positive and negative ions in a plasma generated by the plasma generator.
4. The plasma generator according to claim 1 , further comprising a tube connecting a process gas inlet and a process gas outlet, wherein the piezoelectric transformer and the ion separation electrode are arranged in the tube, and wherein the ion separation electrode is arranged between the piezoelectric transformer and the process gas outlet.
5. The plasma generator according to claim 1 , wherein the drive circuit is adjustable such that the potential at the ion separation electrode is variable.
6. The plasma generator according to claim 1 , wherein the drive circuit comprises a drive circuit transformer configured to generate an AC output voltage and a circuit configured to rectify and smooth the AC output voltage, and wherein the circuit configured to rectify and smooth the AC output voltage is connected to the ion separation electrode.
7. The plasma generator according to claim 1 , wherein the ion separation electrode is grid-shaped.
8. The plasma generator according to claim 1 , wherein the ion separation electrode comprises a metal tube.
9. The plasma generator according to claim 1 , wherein the piezoelectric transformer is configured to generate an atmospheric, non-thermal plasma.