Gas sensor device, and heating current control method for gas sensor device
The purpose of the present invention is to provide a gas sensor device with which highly accurate measurement performance can be achieved even if there are changes in the environmental temperature. The present invention is provided with: a detection heater ( 3 ) formed in a thin film part; a temperature compensation heater ( 4 ) formed so as to surround the detection heater; a detection heater heating control circuit for controlling the heating temperature of the detection heater ( 3 ); and a temperature compensation heater heating control circuit for controlling the heating temperature of the temperature compensation heater to a heating temperature lower than the heating temperature of the detection heater. The detection heater heating control circuit and the temperature compensation heater heating control circuit adjust the respective heating currents in response to an increase in the temperature of a substrate, so as to reduce the temperature difference between the heating temperature of the detection heater ( 3 ) and the heating temperature of the temperature compensation heater ( 4 ).
1. A gas sensor device that measures a physical quantity of gas based on a thin film formed in a part of a substrate; a detection heater formed in the thin film; a temperature compensation heater formed in the thin film so as to surround the detection heater; a detection heater-heating control circuit configured to control a heating temperature of the detection heater; a temperature compensation heater-heating control circuit configured to control a heating temperature of the temperature compensation heater to be set at a heating temperature lower than the heating temperature of the detection heater; and a radiation amount of the detection heater,
wherein each of the detection heater-heating control circuit and the temperature compensation heater-heating control circuit controls a heating current so that a temperature difference between the heating temperature of the detection heater and the heating temperature of the temperature compensation heater reduces in response to a rise in temperature of the substrate.
2. The gas sensor device according to claim 1 ,
wherein the detection heater-heating control circuit and the temperature compensation heater-heating control circuit reduce the heating current in response to the rise in temperature of the substrate so as to decrease a temperature of the detection heater and a temperature of the temperature compensation heater, wherein the heating current is reduced in such a manner that the temperature of the detection heater drops more largely than the temperature of the temperature compensation heater.
3. The gas sensor device according to claim 2 ,
wherein the detection heater-heating control circuit is provided with a bridge circuit comprising: a first side to which the detection heater and a temperature-dependent resistor are connected; a second side including a fixed resistor connected to the first side in series; a third side consisting of a fixed resistor; and a fourth side consisting of a fixed resistor connected to the third side in series, and
the temperature compensation heater-heating control circuit is provided with a bridge circuit comprising: a first side to which the temperature compensation heater and a temperature-dependent resistor are connected; a second side including a fixed resistor connected to the first side in series; a third side consisting of a fixed resistor; and a fourth side consisting of a fixed resistor connected to the third side in series,
wherein the temperature-dependent resistor included in the first side of the detection heater-heating control circuit has resistance larger than resistance of the temperature-dependent resistor included in the first side of the temperature compensation heater-heating control circuit.
4. The gas sensor device according to claim 3 ,
wherein the detection heater and the temperature-dependent resistor included in the first side of the detection heater-heating control circuit are formed on the substrate with the same material, and
the temperature compensation heater and the temperature-dependent resistor included in the first side of the temperature compensation heater-heating control circuit are formed on the substrate with the same material as the detection heater,
wherein the temperature-dependent resistor of the detection heater-heating control circuit includes a wire having a width shorter than a width of a wire included in the temperature-dependent resistor of the temperature compensation heater-heating control circuit.
5. The gas sensor device according to claim 4 ,
wherein the temperature-dependent resistor and the detection heater in the detection heater-heating control circuit have a resistance ratio larger than a resistance ratio between the temperature-dependent resistor and the temperature compensation heater in the temperature compensation heater-heating control circuit.
6. The gas sensor device according to claim 5 ,
wherein the temperature-dependent resistor of the detection heater-heating control circuit consists of a wire formed in the thin film; and a wire formed in a member other than the thin film,
the temperature-dependent resistor of the temperature compensation heater-heating control circuit consists of a wire formed in the thin film; and a wire formed in a member other than the thin film, and
the gas sensor device has a relationship expressed by (r1+r2)/(Rh)>(r3+r4)/(Rs), where r1 represents resistance of the wire of the former control circuit formed in the thin film, r2 represents resistance of the wire of the former control circuit formed in the member other than the thin film and extending to an electrode, r3 represents resistance of the wire of the latter control circuit formed of the thin film, r4 represents resistance of the wire of the latter control circuit formed in the member other than the thin film and extending to an electrode, Rh represents resistance of the detection heater, and Rs represents resistance of the temperature compensation heater.
7. The gas sensor device according to claim 1 ,
wherein the gas sensor device is disposed in an intake passage of an internal combustion engine and measures humidity of intake air.
8. A method of controlling a heating current of a gas sensor device that measures a physical quantity of gas based on a thin film formed in a part of a substrate; a detection heater formed in the thin film; a temperature compensation heater formed in the thin film so as to surround the detection heater; a detection heater-heating control circuit configured to control a heating temperature of the detection heater; a temperature compensation heater-heating control circuit configured to control a heating temperature of the temperature compensation heater to be set at a heating temperature lower than the heating temperature of the detection heater; and a radiation amount of the detection heater,
wherein each of the detection heater-heating control circuit and the temperature compensation heater-heating control circuit controls a heating current so that a temperature difference between the heating temperature of the detection heater and the heating temperature of the temperature compensation heater reduces in response to a rise in temperature of the substrate.
9. The method of controlling a heating current of a gas sensor device according to claim 8 ,
wherein the detection heater-heating control circuit and the temperature compensation heater-heating control circuit reduce the heating current in response to the rise in temperature of the substrate so as to decrease a temperature of the detection heater and a temperature of the temperature compensation heater, wherein the heating current is reduced in such a manner that the temperature of the detection heater drops more largely than the temperature of the temperature compensation heater.