Substrate processing station for laser-based machining of sheet-like glass substrates
A glass sheet processing apparatus includes a first gantry assembly that extends across a glass sheet in a cross-machine direction. The first gantry assembly includes a processing head that moves along a length of the first gantry assembly and includes a laser comprising an optical arrangement positioned in a beam path of the laser providing a laser beam focal line that is formed on a beam output side of the optical arrangement. A second gantry assembly extends across the glass sheet in the cross-machine direction. The second gantry assembly includes a processing head that moves along a length of the second gantry assembly.
1. A glass sheet processing apparatus comprising:
a first gantry assembly that extends across a glass sheet in a cross-machine direction, the first gantry assembly comprising a first processing head and a second processing head, which move along a length of the first gantry assembly, and comprising a laser that provides a laser beam,
the laser comprising an optical arrangement that is positioned in a beam path of the laser beam and that is configured to split the laser beam into a first laser beam provided to the first processing head and a second laser beam provided to the second processing head, the first laser beam and the second laser beam each providing a laser beam focal line that is configured to form a fracture surface area in the glass sheet,
the optical arrangement comprising a first focusing optical element and a second focusing optical element spaced apart from the first focusing optical element, the first and second focusing optical elements being configured to generate each laser beam focal line on a beam output side of the second focusing optical element, and
the optical arrangement comprising a third focusing optical element positioned between the first focusing optical element and the second focusing optical element along the beam path of the laser beam; and
a second gantry assembly that extends across the glass sheet in the cross-machine direction, the second gantry assembly comprising a third processing head that moves along a length of the second gantry assembly.
2. The glass sheet processing apparatus of claim 1 further comprising a first linear actuator operatively connected to the first gantry assembly that moves the first gantry assembly in a machine direction.
3. The glass sheet processing apparatus of claim 2 further comprising a second linear actuator operatively connected to the second gantry assembly that moves the second gantry assembly in the machine direction.
4. The glass sheet processing apparatus of claim 1 , wherein the third processing head of the second gantry assembly comprises a laser comprising an optical arrangement positioned in a beam path of the laser providing a laser beam focal line that is formed on a beam output side of the optical arrangement.
5. The glass sheet processing apparatus of claim 1 further comprising a controller that controls movement of the processing heads of the first gantry assembly and the second gantry assembly.
6. The glass sheet processing apparatus of claim 1 , wherein the second gantry assembly comprises multiple processing heads where each processing head of the second gantry assembly moves along a length of the second gantry assembly in the cross-machine direction.
7. The glass sheet processing apparatus of claim 1 further comprising a conveyor belt configured to carry a glass sheet through the glass sheet processing apparatus, the conveyor belt comprising first and second belt segments connected together and configured to articulate relative to each other.
8. The glass sheet processing apparatus of claim 1 , wherein the first focusing optical element is an axicon and the second focusing optical element is a convex lens.
9. The glass sheet processing apparatus of claim 8 , wherein the third focusing optical element is a plano-convex collimation lens.
10. The glass sheet processing apparatus of claim 1 , wherein the processing head of the second gantry assembly comprises a processing tool that is different from the first processing head and from the second processing head.
11. The glass sheet processing apparatus of claim 10 , wherein the processing head of the second gantry assembly comprises a sprayer or a cleaning nozzle.
12. The glass sheet processing apparatus of claim 1 , wherein the optical arrangement is further configured to split the laser beam into the first laser beam provided to the first processing head, the second laser beam provided to the second processing head, and a third laser beam provided to the third processing head, the first laser beam, the second laser beam, and the third laser beam each providing a laser beam focal line that is configured to form a fracture surface area in the glass sheet.