IP Library Granted Patent US 11,091,649
Granted Patent B2
US 11,091,649 · App. 15/809,431 · Granted Aug 17, 2021

2,2,4,4-tetrasilylpentasilane and its compositions, methods and uses

Inventor: Xiaobing Zhou (Midland, MI)
Assignee: JIANGSU NATA OPTO-ELECTRONIC MATERIALS CO. LTD.
C09D1/00B05D1/02C01B33/04C07F7/0896C23C16/24C23C16/345C23C16/50H01L21/0217H01L21/02164H01L21/02211H01L21/02274H01L21/02282H01L21/32055
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Quick Facts
Patent No.
US 11,091,649
App. No.
15/809,431
Granted
Aug 17, 2021
Kind
B2
Abstract

A compound that is 2,2,4,4-tetrasilylpentasilane, chemical compositions comprising same, methods of making and purifying 2,2,4,4-tetrasilylpentasilane, the purified 2,2,4,4-tetrasilylpentasilane prepared thereby, and methods of forming silicon-containing materials using 2,2,4,4-tetrasilylpentasilane as a precursor.

Claims (7)

1. A compound that is 2,2,4,4-tetrasilylpentasilane.

2. A chemical composition comprising the compound of claim 1 and one or more additional ingredients that differ from 2,2,4,4-tetrasilylpentasilane.

3. The chemical composition of claim 2 , the chemical composition comprising 2,2-disilyltrisilane, wherein area percent (area %, gas chromatograph (GC)) concentration of the 2,2,4,4-tetrasilylpentasilane is greater than the area % (GC) concentration of the 2,2-disilyltrisilane.

4. The chemical composition of claim 3 , wherein concentration of the 2,2,4,4-tetrasilylpentasilane is at least 70 area % (GC) based on total GC area of the chemical composition.

5. The chemical composition of claim 4 characterizable as having a total of from 0 to 9 area % of nonasilane structural isomers other than the 2,2,4,4-tetrasilylpentasilane.

6. The chemical composition of claim 5 characterizable as lacking nonasilane structural isomers other than the 2,2,4,4-tetrasilylpentasilane.

7. The chemical composition of claim 2 , comprising a mixture of 2,2,4,4-tetrasilylpentasilane, monosilane, and 2,2-disilyltrisilane.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 13, 2021
From: JIANGSU NATA OPTO-ELECTRONIC MATERIALS CO. LTD.
To: NATA SEMICONDUCTOR MATERIALS CO., LTD.
Reel/Frame 057459/0181 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2021
From: DDP SPECIALTY ELECTRONIC MATERIALS US 9, LLC
To: JIANGSU NATA OPTO-ELECTRONIC MATERIALS CO. LTD.
Reel/Frame 055054/0570 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 21, 2020
From: DOW SILICONES CORPORATION
To: DDP SPECIALTY ELECTRONIC MATERIALS US 9, LLC
Reel/Frame 054707/0406 →
CHANGE OF NAME Recorded Feb 28, 2018
From: DOW CORNING CORPORATION
To: DOW SILICONES CORPORATION
Reel/Frame 045470/0188 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2017
From: ZHOU, XIAOBING
To: DOW CORNING CORPORATION
Reel/Frame 044349/0657 →
Continuity (3)
Continuation In Part 14915404
Provisional Application 61874064 · Sep 5, 2013
Related Publication 20180066140A1 · Mar 8, 2018