IP Library Granted Patent US 10,504,764
Granted Patent B2
US 10,504,764 · App. 15/814,610 · Granted Dec 10, 2019

Substrate stocker and systems management software

Inventors: Gerhard Dovids (Grabs, CH); Yves Fenner (Berg, CH); John Fiddes (Kreuzlingen, CH); Christian Wohanka (Tägerwilen, CH); Bernd Rahrbach (Constance, DE)
Assignee: MURATA MACHINERY, LTD.
H01L21/67763B65G1/137G05B19/41835G06F3/048G06Q10/04H01L21/67346H01L21/67772H01L21/67778
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Quick Facts
Patent No.
US 10,504,764
App. No.
15/814,610
Granted
Dec 10, 2019
Kind
B2
Abstract

A substrate production, manufacturing, and processing system includes storages with one or more separations that store substrates, loading stations that include robots, opener systems, and a software management system. The storage separations hold first containers that store carriers and the substrates in stacks. Each robot is able to access and move at least one of: the first container, a second container or carrier, and one of the substrates. The opener systems open the first containers such that the carriers and the substrates are able to be accessed by the robots in the loading station, and the software management system assigns at least one category to each stack of carriers and the substrates. The first containers store the substrates with a higher density than the second container or carrier, and the opener systems each include effectors that each hold an individual one of the substrates.

Claims (45)

1. A substrate processing, manufacturing, or storage system comprising:

one or more storages including one or more separations that store a plurality of substrates, wherein the separations hold first containers that store carriers and the plurality of substrates in stacks;

one or more loading stations that each include one or more robots, wherein each robot is able to access and move at least one of: the first containers, a second container or carrier, and one of the plurality of substrates;

one or more opener systems that open the first containers such that the carriers and the plurality of substrates are able to be accessed by the one or more robots in the loading station; and

a software management system that assigns at least one category to each stack of carriers and the plurality of substrates; wherein

the first containers store the plurality of substrates with a higher density than the second container or carrier; and

the one or more opener systems each include effectors that each hold an individual one of the plurality of substrates.

2. A substrate processing, manufacturing, or storage system as in claim 1 , wherein each stack includes only a single category.

3. A substrate processing, manufacturing, or storage system as in claim 1 , further comprising:

a user interface; wherein

the software management system is able to be controlled via a network Connection.

4. A substrate processing, manufacturing, or storage system as in claim 1 , wherein each stack includes different categories assigned for different carriers and substrates within the stack.

5. A substrate processing, manufacturing, or storage system as in claim 4 , wherein the categories are based on pre-defined physical characteristics of the carriers and pre-defined physical characteristics of the plurality of substrates or pre-defined physical characteristics of each stack.

6. A substrate processing, manufacturing, or storage system in claim 4 , wherein the categories are based on current condition sensor data.

7. A substrate processing, manufacturing, or storage system as in claim 4 , wherein:

the categories are dependent on a time characteristic of each stack or the carriers and the plurality of substrates, and

the categories are changed on a time-dependent basis.

8. A substrate processing, manufacturing, or storage system in claim 1 , wherein the software management system controls at least one station such that the software controls actions including at least one of: combining stacks, rearranging stacks, combining categories, or other outputs based on the categories assigned.

9. A substrate processing, manufacturing, or storage system as in claim 8 , further comprising:

a ranking system based on defined categories.

10. A substrate processing, manufacturing, or storage system as in claim 8 , wherein the software management system optimizes or minimizes a route, a number of accesses, a number of stacks, a number of storage operations, or a number of other operations.

11. A substrate processing, manufacturing, or storage system as in claim 10 , wherein the optimization or minimization is based on an input request and pattern.

12. A substrate processing, manufacturing, or storage system as in claim 10 , wherein the optimization or minimization is based on an output pattern or limitation.

13. A software management method to manage a substrate storage, comprising:

providing a stack of carriers and substrates in a first container,

storing the stack of carriers and substrates in the first container in a storage separation, wherein the storage separation is inventoried by at least quantity and category,

assigning at least one category to each stack of carriers and substrates, and

selectively moving the first container or a second container to an opener station, wherein

the first container stores the carriers and substrates with a higher density than the second container; and

the opener station includes effectors that each hold an individual one of the plurality of substrates.

14. A software management method as in claim 13 , wherein each stack includes carriers and substrates assigned a same category.

15. A software management method as in claim 13 , wherein each stack has different categories assigned for different carriers and substrates, within the stack.

16. A software management method as in claim 13 , wherein the categories are based on a characteristic of the carriers, and the substrates.

17. A software management method as in claim 13 , further comprising:

providing a desired stack configuration output for at least one stack and associated container for output, wherein:

the stack configuration includes criteria for quantity and category for an output stack,

checking the inventory of the storage separation for the requested output,

calculating a required input from the storage separation to match the requested output, wherein the input at least satisfied the desired stack configuration output.

18. A software management method as in claim 17 , wherein the step of calculating calculates the fastest and most efficient movement for the required input to match the requested output.

19. A software management method as in claim 17 , further comprising:

moving at least the containers from the required input and requested output by a loading station to the opener station,

opening the first container such that the carriers and the substrates are accessible,

accessing the carriers and the substrates and moving them to a transfer station such that the transfer station contents matches the requested output.

20. A software management method as in claim 19 , further comprising:

transporting the transfer station to a destination location.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 15, 2018
From: TEC-SEM AG
To: MURATA MACHINERY, LTD.
Reel/Frame 045800/0004 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 15, 2018
From: DOVIDS, GERHARD; FENNER, YVES; FIDDES, JOHN; WOHANKA, CHRISTIAN; RAHRBACH, BERND
To: TEC-SEM AG
Reel/Frame 046153/0936 →
Continuity (2)
Provisional Application 62422603 · Nov 16, 2016
Related Publication 20180134491A1 · May 17, 2018