Glass substrate and laminated substrate
The present invention provides a glass substrate in which in a step of sticking a glass substrate and a silicon-containing substrate to each other, bubbles hardly intrude therebetween. The present invention relates to a glass substrate for forming a laminated substrate by lamination with a silicon-containing substrate, having a warpage of 2 μm to 300 μm, and an inclination angle due to the warpage of 0.0004° to 0.12°.
1. A laminated substrate, comprising:
a glass substrate having a warpage of 2 μm to 300 μm and an inclination angle due to the warpage of 0.0004° to 0.12°; and
a silicon-containing substrate,
wherein two or more of the glass substrates are laminated.
2. The laminated substrate according to claim 1 , wherein the glass substrate has an area of one main surface thereof of 70 cm 2 to 2000 cm 2 .
3. The laminated substrate according to claim 2 , wherein the glass substrate has a circular shape.
4. The laminated substrate according to claim 3 , wherein the glass substrate has a value W/D given by dividing the warpage W (unit: μm) by the diameter D (unit: inch) of 0.33 to 25.
5. The laminated substrate according to claim 2 , wherein the glass substrate has a Young's modulus of 65 GPa or more.
6. The laminated substrate according to claim 1 , wherein the glass substrate has a circular shape.
7. The laminated substrate according to claim 6 , wherein the glass substrate has a value W/D given by dividing the warpage W (unit: μm) by the diameter D (unit: inch) of 0.33 to 25.
8. The laminated substrate according to claim 6 , wherein the class substrate has a Young's modulus of 65 GPa or more.
9. The laminated substrate according to claim 1 , wherein the glass substrate has a Young's modulus of 65 GPa or more.
10. The laminated substrate according to claim 1 , wherein a shape of a cross section orthogonal to one main surface of the glass substrate and passing through a center of gravity of the one main surface is concave, and a shape of a cross section passing through the center of gravity of the one main surface and orthogonal to the cross section and the one main surface is convex.
11. The laminated substrate according to claim 1 , wherein a shape of a cross section orthogonal to one main surface of the glass substrate and passing through a center of gravity of the one main surface is concave, and a shape of a cross section passing through the center of gravity of the one main surface and orthogonal to the cross section and the one main surface is concave.
12. The laminated substrate according to claim 1 , wherein the class substrate comprises, as expressed in terms of molar percentage based on oxides,
SiO 2 : 50% to 75%,
Al 2 O 3 : 0% to 16%,
B 2 O 3 : 0% to 15%,
MgO: 0% to 18%,
CaO: 0% to 13%,
SrO: 0% to 11%,
BaO: 0% to 15%,
Na 2 O: 0% to 17%, and
K 2 O: 0% to 15%.
13. The laminated substrate according to claim 1 , wherein the glass substrate has a β-OH of 0.05 mm −1 to 0.65 mm −1 .
14. The laminated substrate according to claim 1 , wherein the class substrate has a thickness deviation of 1 μm to 15 μm.
15. The laminated substrate according to claim 1 , wherein the glass substrate has an average thermal expansion coefficient at 50° C. to 350° C. of 30 (×10 −7 /° C.) to 120 (×10 −7 /° C.).
16. The laminated substrate according to claim 1 , wherein a light shielding film is formed on the main surface of the glass substrate.
17. The laminated substrate according to claim 1 , wherein the glass substrate has a warpage of 2 μm to 200 μm.