Semiconductor device and method of manufacturing the semiconductor device
View Patent ↗Provided is a semiconductor device having a resistor including silicide layers and a polysilicon layer with impurities, and the resistor includes a plurality of boundary surfaces between the silicide layers and the polysilicon layer in a longitudinal direction of the resistor, permitting correction with one photomask when a resistance value of a resistor is deviated from a design value while suppressing upsizing of a semiconductor device. Further, provided is a method of manufacturing the semiconductor device, in which the resistance value is adjusted by changing one mask for forming the silicide layers to change the number of boundary surfaces between the silicide layers and the polysilicon layer, and change a length of the polysilicon layer.
1. A semiconductor device, comprising:
a resistor having a first dimension and a second dimension less than the first dimension so as to define a rectangular shape,
the resistor comprising:
a polysilicon layer including impurities;
contact regions at both ends of the resistor, and including contact portions electrically connected to an upper metal wiring; and
a silicide layer in at least at one region of the resistor separated from the contact regions, in contact with the polysilicon layer via a boundary surface having a resistance value higher than a sheet resistance of the polysilicon layer, and having a width equal to a width of the polysilicon layer.
2. The semiconductor device according to claim 1 , wherein the polysilicon layer has a thickness of 50 nm to 150 nm.
3. The semiconductor device according to claim 1 , wherein the contact regions do not include the silicide layer.
4. The semiconductor device according to claim 2 , wherein the contact regions do not include the silicide layer.
5. A method of manufacturing a semiconductor device, comprising:
measuring a resistance value of the resistor in the semiconductor device of claim 2 ; and
adjusting the resistance value so as to be equal to a design value by increasing a number of the silicide layers when the resistance value is lower than the design value, and by reducing the number of the silicide layers when the resistance value is higher than the design value.
6. The method of manufacturing a semiconductor device according to claim 5 , further comprising adjusting the resistance value so as to be equal to the design value by reducing a length of the silicide layer when the resistance value is lower than the design value, and by increasing the length of the silicide layer when the resistance value is higher than the design value.
7. A method of manufacturing a semiconductor device, comprising:
measuring a resistance value of a resistor in of a semiconductor device comprising:
a resistor having a first dimension and a second dimension less than the first dimension so as to define a rectangular shape,
the resistor comprising:
a polysilicon layer including impurities;
contact regions at both ends of the resistor, and including contact portions electrically connected to an upper metal wiring; and
a silicide layer in at least at one region of the resistor other than the contact regions, in contact with the polysilicon layer via a boundary surface having a resistance value higher than a sheet resistance of the polysilicon layer, and having a width equal to a width of the polysilicon layer; and
adjusting the resistance value so as to be equal to a design value by increasing a number of the silicide layers when the resistance value is lower than the design value, and by reducing the number of the silicide layers when the resistance value is higher than the design value.
8. The method of manufacturing a semiconductor device according to claim 7 , further comprising adjusting the resistance value so as to be equal to the design value by reducing a length of the silicide layer when the resistance value is lower than the design value, and by increasing the length of the silicide layer when the resistance value is higher than the design value.
9. A semiconductor device, comprising:
a resistor having a first dimension and a second dimension less than the first dimension so as to define a rectangular shape,
the resistor comprising:
a polysilicon layer including impurities;
contact regions at both ends of the resistor, and including contact portions electrically connected to an upper metal wiring; and
a silicide layer in at least one region of the resistor separated from the contact regions, in contact with the polysilicon layer via a boundary surface and having a width equal to a width of the polysilicon layer.
10. The semiconductor device according to claim 9 , wherein the silicide layer is present from a front surface to a bottom surface of the resistor.
11. The semiconductor device according to claim 9 , wherein the contact regions do not include the silicide layer.
12. The semiconductor device according to claim 9 , wherein the polysilicon layer has a thickness of 50 nm to 150 nm.