IP Library › Patent Application 15828958
Patent Application
App. No. 15/828,958

Wafer Transport System

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Quick Facts
Patent No.
US None
App. No.
15/828,958
Abstract

A transport system includes, in a first environment, a driving screw having threads with a thread pitch. In a second environment, a driven member has a magnetic coupling with a driven member pitch substantially corresponding to the thread pitch. The magnetic coupling is coupled to a portion of threads and rotation of the driving screw displaces the magnetic coupling with respect to the driving screw.

Claims (10)

1 . A transport system comprising:

in a first environment, a driving screw having threads, the threads having a thread pitch; and

in a second environment a driven member having a magnetic coupling, the magnetic coupling having a driven member pitch substantially corresponding to the thread pitch;

wherein, the magnetic coupling is magnetically coupled to at least a portion of the threads and wherein rotation of the driving screw displaces the magnetic coupling with respect to the driving screw.

2 . The transport system of claim 1 , wherein the driven member comprises a nut substantially surrounding at least a portion of the driving screw.

3 . The transport system of claim 1 , wherein the driven member comprises a gear.

4 . The transport system of claim 1 , wherein the driven member has a support bearing movably coupled to a sleeve, the sleeve disposed between the driving screw and the driven member.

5 . The transport system of claim 1 further comprising a second driving screw having second threads, the driven member further comprising a substrate support and a second magnetic coupling magnetically coupled to at least a portion of the second threads; wherein, rotation of the driving screw displaces the substrate support in a first direction and wherein rotation of the second driving screw displaces the substrate support in a second direction.

6 . The transport system of claim 1 further comprising a second and third driving screw having second and third threads respectively, the driven member further comprising a substrate support and a second and third magnetic coupling magnetically coupled to at least a portion of the second and third threads respectively; wherein, rotation of the first driving screw displaces the substrate support in a first direction and wherein rotation of the second driving screw displaces the substrate support in a second direction and wherein rotation of the third driving screw displaces the substrate support in a third direction.

7 . The transport system of claim 1 , wherein the driven member comprises magnets.