Sensor of volatile substances with integrated heater and process for manufacturing a sensor of volatile substances
A sensor of volatile substances including: a sensitive layer, of a sensitive material that is permeable to a volatile substance and has an electrical permittivity depending upon a concentration of the volatile substance absorbed; a first electrode structure and a second electrode structure capacitively coupled together and arranged so that a capacitance between the first electrode structure and the second electrode structure is affected by the electrical permittivity of the sensitive material; and a supply device, configured to supply a heating current through one between the first electrode structure and the second electrode structure in a first operating condition, so as to heat the sensitive layer.
1. A device, comprising:
a substrate;
a sensitive layer on the substrate, wherein the sensitive layer is permeable to a volatile substance to be detected and has an electrical permittivity that depends on a concentration of the volatile substance absorbed;
a first electrode structure on the sensitive layer, the first electrode structure includes a first electrode finger, a second electrode finger, and a third electrode finger that are coupled together;
a second electrode structure on the sensitive layer, the second electrode structure having a serpentine shape, the second electrode structure being capacitively coupled to the first electrode finger and to the second electrode finger;
a third electrode structure capacitvely coupled to the second electrode structure, the sensitive layer being between the first electrode structure, the second electrode structure, and the third electrode structure, the third electrode structure having a fourth electrode finger capacitively coupled to the second electrode finger and the third electrode finger, wherein the first, second, and third electrode structures are coplanar; and
a supply device configured to couple a heating current to the first electrode structure to transfer heat to the sensitive layer, while the second electrode structure and the third electrode structure remain uncoupled from the heating current of the supply device.
2. The device according to claim 1 , wherein the sensitive layer is made of a hygroscopic polymer.
3. The device according to claim 1 wherein the first, second and third electrode fingers of the first electrode structure extend away from a first extension that is transverse to the first, second and third electrode fingers.
4. The device according to claim 1 wherein the second electrode structure is consistently spaced from the first, second and third electrode fingers of the first electrode structure.
5. A device, comprising:
a substrate;
a sensitive layer on the substrate;
a first electrode structure on the sensitive layer, the first electrode structure includes a first electrode finger, a second electrode finger, and a third electrode finger that are coupled together;
a second electrode structure on the sensitive layer, the second electrode structure having a serpentine shape, the second electrode structure being capacitively coupled to the first electrode finger and to the second electrode finger, the sensitive layer being between the first electrode structure and the second electrode structure;
a third electrode structure on the sensitive layer, the third electrode structure having a fourth electrode finger capacitively coupled to the second electrode finger and the third electrode finger, the first, second, and third electrode structures being coplanar; and
a supply device configured to couple a heating current through the first, second, and third electrode fingers of the first electrode structure in a first operating condition to heat the sensitive layer, the second and third electrode structures remaining uncoupled from the heating current of the supply device.
6. The device according to claim 5 wherein the first, second and third electrode fingers of the first electrode structure extend away from a first extension that is transverse to the first, second and third electrode fingers.
7. The device according to claim 6 wherein the second electrode structure is consistently spaced from the first, second and third electrode fingers of the first electrode structure.
8. A device, comprising:
a substrate;
a cavity in the substrate;
a hygroscopic polymer in the cavity;
a first electrode structure on a plane in the cavity, the first electrode structure having a first plurality of electrode fingers;
a second electrode structure on the plane in the cavity, the second electrode structure having a second plurality of electrode fingers, the first plurality of electrode fingers extending between the second plurality of electrode fingers;
a third electrode structure on the plane in the cavity, the third electrode structure having a serpentine shape that is positioned between adjacent ones of the first and second pluralities of electrode fingers; and
a supply device configured to couple a heating current to the first electrode structure to transfer heat to the hygroscopic polymer, while the second electrode structure and the third electrode structure remain uncoupled from the heating current of the supply device.
9. The device of claim 8 wherein each of the first and second electrode structures are U-shaped.
10. The device of claim 9 wherein each of the U-shaped first and second electrode structures includes a base and a first and second prong that extend away from the base.
11. The device of claim 10 wherein the third electrode structure includes a first end positioned adjacent to the base of the first electrode structure and a second end positioned adjacent to the base of the second electrode structure.
12. The device of claim 11 wherein the third electrode structure is consistently spaced from the first electrode structure and the second electrode structure.