Infra-red device

1. An Infrared (IR) device comprising:

a first substrate comprising a first cavity;

a dielectric layer disposed on the first substrate;

a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity;

an optically transmissive layer attached to one of the first and second substrates;

a further layer provided to the other of the first and second substrates so that the IR device is substantially closed;

wherein holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity; and

further comprising a reflective material directly underneath the dielectric layer and on the further layer.

2. A device according to claim 1 , wherein the first cavity and the second cavity have vacuum with a substantially same pressure level.

3. A device according to claim 2 , further comprising a getter material within one of the cavities to maintain the vacuum.

4. A device according to claim 1 , wherein the first cavity and the second cavity are filled with a gas having a thermal conductivity lower than air.

5. A device according to claim 1 , wherein the device is packaged at a wafer level having any one of filters, caps, lenses built at the wafer level.

6. A device according to claim 1 , further comprising through-semiconductor vias placed within at least one of the first and second substrates to connect the IR device to other circuits.

7. A device according to claim 6 , further comprising at least one bonding ball coupled with the through-semiconductor via.

8. A device according to claim 1 , wherein walls of the first cavity and the second cavity comprise a reflective material to enhance emission or absorption in the IR device.

9. A device according to claim 1 , wherein at least one of the first and second substrates comprises sloped side walls each having a reflective material.

10. A device according to claim 1 , wherein the further layer is a continuous layer of the first substrate providing a shallow first cavity.

11. A device according to claim 1 , wherein the further layer has a similar width compared to a width of the first cavity.

12. A device according to claim 1 , wherein the infrared device is any one of an infrared emitter and an infrared detector.

13. A device according to claim 1 , wherein the infrared device is a thermal micro-machined infrared device.

14. A device according to claim 1 , wherein the infrared device is directly connected above an application specific integrated circuit (ASIC).

15. A device according to claim 14 , wherein the ASIC comprises any of the drive circuitry, read-out and amplifying circuits, memory or processing cells, state-machines or micro-controllers.

16. A device according to claim 1 , wherein the first substrate has a greater width compared to the second substrate, and wherein the dielectric layer extends on the entire width of the first substrate.

17. A device according to claim 16 , further comprising at least one bond pad on the dielectric layer outside the second substrate.

18. A device according to claim 17 , further comprising a wire connected to the bond pad, wherein the wire is configured to be connected to another die or circuit.

19. A method of manufacturing an infrared device according to claim 1 , the method comprising:

fabricating wafers and devices containing IR devices;

forming top and bottom substrates having two cavities, one below and one above the infrared devices each including transmissive layers, filters/caps/lenses/getter layers;

sealing the cavities in vacuum or with a gas with low thermal conductivity by means of bonding, adhesive layers, glues;

forming through semiconductor vias on either bottom or top substrates to connect the IR device;

forming solder bumps and/or 3D interconnections; and

singulating each infrared device.