Method for manufacturing solar cell

1. A method for manufacturing a solar cell, the method comprising:

forming a semiconductor layer on one surface of a semiconductor substrate;

forming a mask layer comprising a first layer and a second layer sequentially on the semiconductor layer;

texturing another surface of the semiconductor substrate using the mask layer as a mask;

forming a patterned mask layer by forming an opening in the mask layer through a laser patterning using a laser; and

forming a conductive region through a doping process of doping a portion of the semiconductor layer exposed through the opening with a dopant.

2. The method of claim 1 , wherein the first layer comprises a material having a laser patterning property superior to that of the second layer.

3. The method of claim 1 , wherein the second layer comprises a material having a chemical resistance property superior to that of the first layer.

4. The method of claim 1 , wherein the second layer comprises a material having a dopant barrier property superior to that of the first layer.

5. The method of claim 1 , wherein the first layer and the second layer include silicon and carbon, and the first layer and the second layer are formed of different materials or have different compositions from each other.

6. The method of claim 5 , wherein the first layer and the second layer are formed by a continuous process in the same apparatus.

7. The method of claim 5 , wherein the first layer comprises silicon carbide, and

wherein the second layer comprises silicon oxycarbide.

8. The method of claim 5 , wherein an oxygen content of the second layer is greater than an oxygen content of the first layer.

9. The method of claim 7 , wherein a thickness of the second layer is the same as or greater than a thickness of the first layer.

10. The method of claim 9 , wherein the first layer has a thickness of 10 to 100 nm, and

wherein the second layer has a thickness of 90 to 150 nm.

11. The method of claim 7 , wherein the first layer has a refractive index of 1.6 to 1.8, and

wherein the second layer has a refractive index of 1.5 to 1.7.

12. The method of claim 1 , wherein each of the first layer and the second layer are formed by a vapor deposition method,

wherein a deposition rate of the second layer is greater than a deposition rate of the first layer, and

wherein a thickness of the second layer is the same as or greater than a thickness of the first layer.

13. The method of claim 1 , wherein the mask layer is entirely formed on the semiconductor layer in the forming of the mask layer.

14. The method of claim 1 , wherein the texturing is performed by a wet texturing using an alkali solution.

15. The method of claim 1 , wherein the laser is at least one of the group of a green laser and a pulsed laser.

16. The method of claim 1 , wherein the dopant used in the doping process has a conductivity type the same as that of a main dopant included in the semiconductor substrate, and

wherein the dopant is doped to the other surface of the semiconductor substrate together in the doping process to simultaneously form an surface field region and the conductive region.

17. The method of claim 1 , further comprising:

another doping process of doping the semiconductor layer with another dopant having a conductivity type opposite to that of the dopant used in the doping process to form another conductive region.

18. The method of claim 17 , wherein the another conductive region is formed by a manufacturing process different from that of the conductive region.

19. The method of claim 1 , further comprising:

forming a control passivation layer on the one surface of the semiconductor substrate where the semiconductor layer is to be formed, before the forming of the semiconductor layer,

wherein, in the forming of the semiconductor layer, the semiconductor layer is formed on the control passivation layer.

20. The method of claim 1 , wherein the semiconductor layer comprises an amorphous, micro-crystalline, or poly-crystalline semiconductor.