THERMAL CONDUCTION DEVICES AND METHODS FOR EMBEDDED ELECTRONIC DEVICES
A semiconductor device includes a semiconductor die that is coupled to a substrate. A mold compound encapsulates the semiconductor die and one or more passages are in the mold compound between a backside of the mold compound and an electrically non-active region of the first semiconductor die. A thermal conductor material within the one or more of the passages.
1 . A semiconductor device, comprising:
a semiconductor die coupled to a substrate;
a mold compound encapsulating the semiconductor die;
one or more passages in the mold compound between a topside of the mold compound and the semiconductor die; and
a thermal conductor material within the one or more passages.
2 . The semiconductor device further comprising:
a metallization layer coupled to a backside of the semiconductor die.
3 . The semiconductor device of claim 1 further comprising:
wire bonds from the semiconductor die coupled to a topside of the substrate.
4 . The semiconductor device of claim 1 further comprising:
wherein the semiconductor die is a first semiconductor die, the device further comprising a second semiconductor die coupled to the first semiconductor die having a height that is different than a height of the first semiconductor die; and
one or more passages in the mold compound between the topside of the mold compound and the second semiconductor die.
5 . The semiconductor device of claim 1 wherein the one or more passages are an array of passages substantially evenly spaced over the semiconductor die.
6 . The semiconductor device of claim 1 further comprising:
a passivation layer extending over the one or more passages.
7 . The semiconductor device of claim 1 wherein the one or more passages extend through an electrically non-active region of the semiconductor die.
8 . A semiconductor device, comprising:
a first semiconductor die coupled to a substrate;
a second semiconductor die coupled to a backside of the first semiconductor die;
a mold compound encapsulating the first and second semiconductor dies;
one or more passages in the mold compound between a backside of the mold compound and an electrically non-active region of either the first or second semiconductor dies; and
a thermal conductor material within the one or more passages.
9 . The semiconductor device of claim 8 wherein the first semiconductor die is a processor and the second semiconductor die is a memory.
10 . The semiconductor device of claim 8 further comprising:
wire bonds coupled between the second semiconductor die and the substrate.
11 . The semiconductor device of claim 8 wherein the one or more passages in the mold compound are between the backside of the mold compound and the electrically non-active region of the first semiconductor die and between the backside of the mold compound and the electrically non-active region of the second semiconductor die.
12 . The semiconductor device of claim 8 further comprising:
one or more passages in the mold between a backside of the mold compound and an electrically non-active region of the substrate.
13 - 19 . (canceled)