Semiconductor device and ball bonder
In order to inhibit forming cracks under a pad opening during ball bonding without increasing a chip size, a protective film includes a pad opening that exposes a part of a topmost layer metal film of the chip. A second metal film provided under the pad opening has a ring shape that defines a rectangular opening under the pad opening. The opening edge of the opening in the second metal film extends inwardly beyond the edge of the overlying pad opening. Vias connect the second metal film and the topmost layer metal film, and all of these vias are located outside the pad opening in plan view.
1. In combination: a semiconductor device having a pad opening; and a ball bonder configured to bond a wire to the semiconductor device in the pad opening;
wherein the semiconductor device comprises:
a semiconductor substrate;
a first insulating film formed on a surface of the semiconductor substrate;
a first metal film formed on the first insulating film;
a second insulating film formed on the first metal film;
a first part of a second metal film formed on the second insulating film;
first vias formed in the second insulating film to connect the first metal film and the first part of the second metal film;
a third insulating film formed on the first part of the second metal film;
a topmost layer metal film formed on the third insulating film;
second vias formed in the third insulating film to connect the first part of the second metal film and the topmost layer metal film; and
a protective film formed on the topmost layer metal film and having a pad opening formed therein to expose a part of a surface of the topmost layer metal film,
the first metal film being connected to the semiconductor substrate through contacts formed in the first insulating film under the topmost layer metal film,
the first part of the second metal film having a ring shape defining an opening that is rectangular in plan view under the pad opening,
an edge of the first part of the second metal film that defines the opening being located inside the pad opening in plan view, and
all of the second vias consisting of vias that connect the first part of the second metal film and the topmost layer metal film being located outside the pad opening in plan view; and
wherein the ball bonder comprises:
a capillary through which a wire is fed for bonding directly to the topmost layer metal film in the pad opening of the semiconductor device,
the capillary having a tip through which the wire is fed, and
the tip having a width smaller than a width of the pad opening and having a beveled corner having a width smaller than a width of the opening in the second metal film of the semiconductor device, and
wherein a width of the opening in the first part of the second metal film is less than a diameter of a crushed ball on the topmost layer metal film.
2. The combination according to claim 1 , wherein both the pad opening and the opening are square.
3. The combination according to claim 1 , further comprising a second part of the second metal film formed under the pad opening, the second part of the second metal film being rectangular or circular in cross section.
4. The combination according to claim 3 , wherein the second part of the second metal film is electrically connected to the topmost layer metal film through the second vias.
5. The combination according to claim 1 , further comprising a second part of the second metal film formed under the pad opening, the second part of the second metal film comprising a combination including a group of a plurality of rectangles or circles in cross section.
6. The combination according to claim 1 , wherein the first part of the second metal film has a slit formed therein.
7. The combination according to claim 1 , further comprising an element formed under the pad opening.
8. The combination according to claim 7 , wherein the element is an ESD protection element.
9. In combination: a semiconductor device having a pad opening; and a ball bonder configured to bond a wire to the semiconductor device in the pad opening;
wherein the semiconductor device comprises:
a semiconductor substrate;
a first insulating film formed on a surface of the semiconductor substrate;
a first metal film formed on the first insulating film;
a second insulating film formed on the first metal film;
a second metal film formed on the second insulating film and having a ring shape defining a rectangular opening that extends through the second metal film;
first conductive vias extending through the second insulating film to electrically connect the first metal film and the second metal film;
a third insulating film formed on the second metal film;
a topmost layer metal film formed on the third insulating film;
second conductive vias extending through the third insulating film to electrically connect the second metal film and the topmost layer metal film; and
a protective film formed on the topmost layer metal film and having a pad opening formed therein that exposes a part of a surface of the topmost layer metal film, wherein
the first metal film is electrically connected to the semiconductor substrate through contacts formed in the first insulating film under the topmost layer metal film,
the rectangular opening is located entirely inside the pad opening in plan view, and
all of the second conductive vias consisting of vias that connect the first part of the second metal film and the topmost layer metal film being located outside the pad opening in plan view, and
wherein the ball bonder comprises:
a capillary through which a wire is fed for bonding directly to the topmost layer metal film in the pad opening of the semiconductor device,
the capillary having a tip through which the wire is fed, and
the tip having a width smaller than a width of the pad opening and having a beveled corner having a width smaller than a width of the opening in the second metal film of the semiconductor device, and
wherein a width of the opening in the second metal film is less than a diameter of a crushed ball on the topmost layer metal film.
10. The combination according to claim 9 , wherein the pad opening has a rectangular shape.
11. The combination according to claim 9 , wherein the rectangular opening and the pad opening both have a square shape.