MEMBRANE SUBSTRATE STRUCTURE FOR SINGLE CRYSTAL ACOUSTIC RESONATOR DEVICE
A substrate structure for an acoustic resonator device. The substrate has a substrate member comprising a plurality of support members configured to form an array structure. In an example, the substrate member has an upper region, and optionally, has a plurality of recessed regions configured by the support members. The substrate has a thickness of single crystal piezo material formed overlying the upper region. In an example, the thickness of single crystal piezo material has a first surface region and a second surface region opposite of the first surface region.
1 - 16 . (canceled)
17 . A substrate structure for an acoustic resonator device, the substrate comprising:
a substrate member comprising a plurality of support members configured to form an array structure, the substrate member having an upper region;
a thickness of single crystal piezo material formed overlying the upper region, the thickness of single crystal piezo material having a first surface region and a second surface region opposite of the first surface region;
a plurality of exposed regions of the second surface region of the thickness of single crystal piezo material, each of the exposed regions configured by at least a pair of support members and is configured to form an element of the array structure.
18 . The substrate of claim 17 wherein the upper region is configured from a surface region of a silicon substrate.
19 . The substrate of claim 17 wherein the upper region is configured from a surface region of a silicon substrate; and wherein the plurality of support members provided by an etching process configured to form a plurality of pillar structures and a plurality of rib structures; and further comprising a pair of electrodes configured between a portion of the thickness of single crystal piezo material.
20 . A method of forming an acoustic resonator device, the method comprising:
providing a substrate member comprising a plurality of support members configured to form an array structure, the substrate member having an upper region;
forming a thickness of single crystal piezo material formed overlying the upper region, the thickness of single crystal piezo material having a first surface region and a second surface region opposite of the first surface region such that the thickness of single crystal piezo material has a plurality of exposed regions of the second surface region of the thickness of single crystal piezo material, each of the exposed regions configured by at least a pair of support members and is configured to form an element of the array structure.